Papers by Author: Woong Cho

Abstract: The dishing phenomena of soft materials in chemical mechanical polishing (CMP) process were problematic in delineating inlaid metal patterns. The inlaid copper structures were fabricated on Si wafer where SiO2 was thermally grown. Seed layer was deposited by thermal evaporate method followed by copper electrodeposition. Copper was electrodeposited with IBM paddle type electroplating machine to obtain uniform thickness of coating. The dishing amounts were measured at various current density and current type. The dishing amounts with pattern density and line width were also measured. The losses of copper were not sensitively dependent on current density however those were dependent on current type. The dishing amount of copper was decreased at high pattern density especially over 50% and increased with line width. Surface topology and grain size of coating were investigated with surface profilometer and FESEM.

Abstract: This paper reports a low-cost microthermostat that is able to maintain a constant temperature necessary for restriction enzyme digestion. Polydimethylsiloxane (PDMS) and Pyrex glass were used to make the microthermostat, because PDMS is a cheap and mass-producible material and both PDMS and glass have very good biocompatibility compared to the more commonly used silicon. A heater made of Au wiring patterned on Pyrex glass was used to control the temperature. A PDMS replica molding technique was used to fabricate a reaction chamber with 3.6 μl capacity. Restriction enzyme digestion was performed by using the fabricated microthermostat and by a conventional method. Then, using gel electrophoresis, we compared results between the microthermostat and conventional methods. It was found that restriction enzyme digestion using the microthermostat required 5 min of heating.

Abstract: Experimental investigation and numerical simulation on the effect of surface wettability on the performance of a polydimethylsiloxane (PDMS) based diffuser micropump are presented. A valveless micro membrane pump with piezoelectric actuation has been examined. Using a replica molding technique, the valveless micropump was made of PDMS on a Pyrex glass substrate. A thin piezoelectric (PZT) disc was used as an actuator. Poly vinyl alcohol (PVA) and octadecyltrichlorosilane (OTS) coatings, which make the coated surface hydrophilic and hydrophobic, respectively, were used to modify the surface wettability inside the pump. In our experiments, the contact angle of the PDMS surface changed from 96.6 o to 29.1 o and 99.6 o by PVA and OTS coatings, respectively, and the contact angle of glass changed from 33.2 o to 17.5 o and 141.8 o. A self-priming process was numerically simulated in a diffuser element using a computational fluid dynamics program (CFD-ACE+). The results show that fewer gas bubbles were created in the hydrophilic coated pump than in the hydrophobic coated one as time progressed. This agrees well with experimental observations. Steady-state flow rates of the micropump were measured. Compared to the non-coated pump, the flow rate increased slightly with the hydrophobic coating but decreased with the hydrophilic coating. We determine that surface wettability significantly affects the performance of a PDMS-based micropump.