Authors: Bo Wen Zhang, Yong Da Yan, Zhen Jiang Hu, Xue Sen Zhao, Ying Chun Liang, Wei Dong Fei, Shen Dong
Abstract: As the dimensions of parts become smaller, understanding the mechanical properties of these small components was becoming more important. Till present day, the methods and technology used to investigate the deformation behavior in nanoscale were still lacking. In this paper, the specimens were single crystal copper wires with diameter in 50 microns. Atomic force microscope integrated with an in- situ tensile system were used to determine the mechanical behavior of copper wires and observe the surface topography deformation in nanoscale simultaneously. The results were as follows: the modulus of elasticity, tensile strength and failure strain of the sample were 167Gpa, 0.564GPa and 0.011, respectively. By using AFM, the separation process between the copper wire and impurities on it, such as oxide film, was observed. The nanoscale deformation process of the copper wire was also obtained.
4197
Authors: Zhen Jiang Hu, Yong Da Yan, Tao Sun, Shen Dong, Z.Z. Zhao
Abstract: The equations correlated the normal load and the tip penetration depth were derived
through the theoretical analysis of the penetration process of the diamond tip. Verified by
experiments, the equations can reflect the penetration process of the scratching machining system
and provide theoretical basis for the optimization of depth control algorithm. The control of
scratching depth realized in AFM deflection mode can effectively restrain the system drift during
scratching process.
578
Authors: Yong Zhi Cao, Shen Dong, Ying Chun Liang, Tao Sun, Yong Da Yan
Abstract: Ultrathin block copolymer films are promising candidates for bottom-up nanotemplates
in hybrid organic-inorganic electronic, optical, and magnetic devices. Key to many future
applications is the long range ordering and precise placement of the phase-separated nanoscale
domains. In this paper, a combined top-down/bottom-up hierarchical approach is presented on how
to fabricate massive arrays of aligned nanoscale domains by means of the self-assembly of
asymmetric poly (styrene-block-ethylene/butylenes-block-styrene) (SEBS) tirblock copolymers in
confinement. The periodic arrays of the poly domains were orientated via the introduction of AFM
micromachining technique as a tool for locally controlling the self-assembly process of triblock
copolymers by the topography of the silicon nitride substrate. Using the controlled movement of 2-
dimensional precision stage and the micro pressure force between the tip and the surface by
computer control system, an artificial topographic pattern on the substrate can be fabricated
precisely. Coupled with solvent annealing technique to direct the assembly of block copolymer, this
method provides new routes for fabricating ordered nanostructure. This graphoepitaxial
methodology can be exploited in hybrid hard/soft condensed matter systems for a variety of
applications. Moreover, Pairing top-down and bottom-up techniques is a promising, and perhaps
necessary, bridge between the parallel self-assembly of molecules and the structural control of
current technology.
437
Authors: Fei Hu Zhang, Hua Li Zhang, Yong Da Yan, Jing He Wang
Abstract: Nanomachining tests have been conducted on single-crystal Al using atomic force
microscope to simulate single-blade machining process of single gain. The influences of
nanomachining experimental parameters (lateral feed and velocity) on the properties of engineering
surface, material removal and chip formation were studied. Results indicated that the cutting depth
of nanomachined surface increased as the lateral feed decreased. Insensitivity of cutting depth to
velocity at same normal load was revealed. The different chip behaviors of nanomachined surface
were investigated through scanning electron microscope (SEM). Results indicated that different
lateral feeds caused different chip behaviors. Three typical chip behaviors were characterized as the
lateral feed increased. In addition, the chip behavior and the volume of material removed were
observed having no evident linear transformation with the evolution of the velocity by SEM
graphics. Furthermore, it was concluded from the chip behaviors in nanomachining process that the
material at high loads was removed by plastic deformation with no fracture or crack happened.
269
Authors: Zeng Qiang Li, Tao Sun, Yong Da Yan, Jun Jie Zhang, Ying Chun Liang, Shen Dong
Abstract: Molecular dynamics is a rapidly developing field of science and has become an established
tool for studying the dynamic behavior of material machining. A three-dimensional molecular
dynamics (MD) model about the atoms of the diamond cutting tools and the diamond grits is built by
using the molecular dynamics. The Tersoff potential function is used to calculate the force and potential
energy among the atoms of the diamond tools and the atoms of the diamond grits. The lapping
processes at a special cutting depth are simulated. The variety of the specimen potential energy in the
lapping process is observed. The mechanism of the diamond micro machining and the form of the
surface formation are given by comparing the distribution maps of atoms in initial and cutting states.
This study will give a strong support to the diamond cutting tools’ lapping.
249
Authors: Yong Da Yan, Tao Sun, Shen Dong, Ying Chun Liang
Abstract: A three dimensional molecular dynamics model is employed to simulate AFM-based
lithography process. To investigate effects of tip geometry, three kinds of tip models are proposed:
a cone-shape tip with a hemisphere at the end, a round-edged three sided pyramid tip with a
hemisphere at the end and a sharp-edged three sided pyramid tip. These models simulate scratching
behaviors of AFM tip at different scratching depths. Results showed that materials removal
behavior and scratching forces were significantly affected by tip geometry, depending on the
scratching depth and scratching directions. The specific energy using a sharp-edged three sided
pyramid tip displayed a different behavior comparing to that using a round-edged three sided
pyramid. However, scratching orientations exhibited no effects on the specific energy.
228
Authors: Yong Da Yan, Tao Sun, Shen Dong
Abstract: Effects of the scratching feed on machined surface and scratching forces are studied by
using AFM-based nanomachining process scratching along the long axis of the cantilever. Results
show: A deeper structure and rougher surface can be obtained at a smaller feed. An increase in the
feed results in increases in scratching forces and the resultant force and a decrease in the normal
force. Finally, all forces reach to a saturation value. The ratio of the cutting force to the thrust force
in the plane perpendicular to the cutting edge can reveal effects of ploughing and cutting between
the tip and the sample in the nanomachining process. Correspondingly, different states (cutting or
ploughing) play a key role in formation of the machined surface at different feeds.
257
Authors: Z.J. Hu, S.G. Zhang, Xiu Hua Zheng, Yong Da Yan, T. Sun, Qing Liang Zhao, Shen Dong
Abstract: With the development of science and technology, Atomic Force Microscope is widely
applied to the field of machining process in nanometer scale. Due to the limitation of the inventive
purpose of AFM, only height mode and deflection mode can be applied in AFM-tip micromachining.
It can’t control the machining depth during the micromachining process at present. In this paper, a
new micromachining system is set up, which composed of a high precision three-dimensional stage,
an AFM, a diamond probe and a special control device. By utilizing variation parameters PID
algorithm and controlling the machining depth directly, the micromachining system can resolve the
problem mentioned above.
800
Authors: Xue Sen Zhao, T. Sun, Yong Da Yan, Zheng Qiang Li, Shen Dong
Abstract: The measuring system was developed based on a reconstructed atomic force microscope
(AFM) combined with the precision rotating air-bearing and assistant transform shaft. By this
system the experiment was carried out according to the principle of three orthogonal orientations
towards a micro sphere about 0.46 mm in diameter, and nine one-dimensional traces around the
sphere were obtained. Analyses on roundness and sphericity are carried out from the measured
data.The results show that the maximal roundness is 0.3895 μm, and the sphericity error is 0.3880
μm.These evaluations are significant references to evaluate its fabrication accuracy or to reform its
machining processes.
796
Authors: Xiao Li Zhao, Shen Dong, Ying Chun Liang, T. Sun, Yong Da Yan
Abstract: Atom Force Microscopy (AFM) can be employed to create surfaces in Si substrate with
recessed features. The resulting patterns can serve as masters to make the required elastomeric stamps
for soft lithography. Morphology analysis of patterned features on Si substrate and
polydimethylsiloxane (PDMS) stamp by AFM imaging confirms that pattern can be successfully
transferred from Si substrates to PDMS stamps. It is shown that this method for creating masters can
be performed with an AFM, making this method particularly straightforward, economical and
accessible to a large technical community that are provided with AFM for measurement.
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