Authors: Soon Young Oh, Jang Gn Yun, Yong Jin Kim, Won Jae Lee, Hee Hwan Ji, Ui Sik Kim, Han Seob Cha, Sang Bum Heo, Jeong Gun Lee, Yoo Jeong Cho, Gil Jin Han, Yeong Cheul Kim, Jin Suk Wang, Hi Deok Lee
Abstract: In this paper, novel Ni Germanosilicide technology using the 1%-nitrogen doped Ni and
pure Ni stack structure has been proposed for nano-scale CMOS technology. The Ni Germanosilicide
is formed on the Si0.8Ge0.2 layer which is known as an optimal composition for strained silicon
application. Proposed structure showed much better thermal stability than pure Ni case. Silicide
characteristics such as the sheet resistance, the interface uniformity of silicide/SiGe, surface
roughness, and depth profile of the Ni, Si, and Ge showed little degradation even with the high
temperature post-silicidation annealing at 600 for 30 min. Therefore, the proposed method is
highly promising for nano-scale CMOS technology.
623
Authors: Yong Jin Kim, Chel Jong Choi, Soon Young Oh, Jang Gn Yun, Won Jae Lee, Hee Hwan Ji, Jin Suk Wang, Hi Deok Lee
Abstract: In this paper, the electrical properties of NiSi have been characterized using multi capping
layer structure for nano CMOS application. We have investigated the formation and thermal stability
of Ni silicide using Ni, Ti and TiN capping layers (Ti/Ni/TiN) as a function of Rapid Thermal
Processing (RTP) temperature. It was shown that the NiSi with multi capping layer has lower sheet
resistances than that with single capping (TiN) layer. NiSi with multi capping layer also showed much
better thermal stability. It was verified that the formation Ni-Ti-Si ternary like layer at the top region
of thhe NiSi results in improvement of thermal stability.
1261
Authors: Jung Ho Ahn, Yan Li Wang, Yong Jin Kim, Sung Jin Kim, Hyung Sik Chung
Abstract: We have synthesized multi-wall carbon nanotube (MWCNT)-reinforced Al matrix
composites. The Al/MWCNT composite powders were prepared by ball milling using pristine Al or
ball-milled Al powders as starting materials. The composite powders were consolidated by a
conventional cold-compaction, followed by sintering. Uniform dispersion of individual MWCNTs
within the matrix was in particular a critical factor for obtaining high density and high quality
Al/MWCNT composites. Compared to pristine Al powders as starting materials, the Al powders
previously attrition-ball-milled with carbon-based PCA (process control agent) in an ammonia
atmosphere resulted in a better distribution of carbon nanotubes within the Al matrix and a higher
density after sintering.
860
Authors: Jung Ho Ahn, Yong Jin Kim, S.J. Hwang, Hyung Sik Chung
Abstract: This study examines the ball-milling of CVD-processed multi-wall carbon nanotubes
for cutting and opening their tips. Results show that dry milling causes nanotubes to rapidly
collapse, hence transforming into graphite structure, while wet milling with some organic
compounds effectively shortened and opened the nanotubes. Carbon-based milling agents are
known to alter surface structure of carbon nanotubes, minimizing an excess algglomeration and
consequently improving dispersion of nanotubes. The open tip structure was unstable and quite
susceptible to re-close during milling and thermal treatments to minimize their surface energy.
193
Authors: Byoung Kee Kim, Yong Jin Kim, Jin Chun Kim
Abstract: Ni59Zr20Ti16Si2Sn3 bulk metallic glass (BMG) powders were produced by a gas
atomization process, and ductile Cu powders were coated on the Ni-based BMG powders using a
spray drying process in order to increase the ductility. Characteristics of the as-prepared powders
with the atomization and spray drying process conditions were investigated. The atomization was
conducted at 1450oC under the vacuum of 10-2 torr and the powders were mixed with water-soluble
Cu nitrate. The mixture was sprayed at the temperature of 130oC to prepared initial powder. After
reduction treatment, sub-micron size Cu powders were successfully coated on the surface of the
atomized Ni BMG powders.
133
Authors: Kil Jin Han, Yu Jeong Cho, Soon Young Oh, Yong Jin Kim, Won Jae Lee, Hi Deok Lee, Yeong Cheul Kim
Abstract: We investigated the effect of SiOcap layer on the thermal stability of nickel and
nickel-cobalt silicide by measuring its sheet resistance. The stability of nickel silicide was
deteriorated as a function of annealing temperature, while that of nickel-cobalt silicide was not. In
case of both silicides, the SiOcap layer improved the stability. Tensile stress from the difference of
thermal expansion coefficients between SiO2 and nickel silicide may suppress the agglomeration of
nickel silicide.
1322
Authors: Yong Jin Kim, L.F. Wang, In Sang Chung, Jin Chun Kim, Tae Suk Jang
Abstract: The hypereutectic prealloyed Al-Si powders were prepared by gas atomization process.
The microstructure and compacting ability of the atomized Al-Si powders were investigated. With
increasing the gas pressure of the atomization, the average powder size and oxygen content were
decreased. The size of primary eutectic Si particles in the as-atomized powders was about 8~10.
As-atomized powders were hot-pressed into a cylindrical shape. Relative density of the hot-pressed
samples was achieved about 96~99 % of theoretical density. Some properties of the samples were
evaluated in this paper.
61
Authors: Jung Ho Ahn, Yong Jin Kim, G.X. Wang, H.K. Liu
Abstract: Ag and SnO2 nanopowders were synthesized by reverse-micelle method. The reverse micelles were prepared to form tiny aqueous droplets dispersed in oil-based solvents. Two reverse micelles containing metallic salts and reductive agents were rigorously mixed to form nanoparticles inside aqueous droplets by a reductive reaction. The spherical powders of 20~50 nm were formed during the process. The resulting Ag and SnO2 nanopowders were examined as the anode electrode for lithium-ion cells. The reversible discharge capacity of the Ag and SnO2 nanopowders after 25 cycles were 315 and 380 mAh/g, respectively.
1
Authors: Jung Ho Ahn, Yongkyun Paek, Hyung Seop Shin, Yong Jin Kim
739
Authors: Yong Jin Kim, Byoung Kee Kim, Hyung Sik Chung, Jung Ho Ahn
303