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Papers by Keyword: Cz Boron-Doped Silicon

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Determination of Effective Diffusion Coefficient of Copper in Silicon by Diffusion from Bulk into the Polysilicon Backside

Authors: Mohammad B. Shabani, K. Hirano, Y. Shiina, T. Kihara, T. Shingyoji

385

Iron Solubility in Boron-Doped Silicon and Fe Gettering Mechanism in p/p⁺ Epitaxial Wafers

Authors: Mohammad B. Shabani, Y. Shiina, S. Shimanuki, F.G. Kirscht

331