Papers by Keyword: EBID

Abstract: A mechanical nanomanipulation system has been developed for the assembly and fabrication of nano-devices inside a scanning electron microscope (SEM). The mechanical manipulator is made up of commercially available actuators and positioning stages which consists of three individual operation units each having three linear stages and one rotational stage. Experiments were performed to construct 2D and 3D nanostructures with Au nanowires. Versatile manipulations including shape modification, length amendment, and connection of nanowires were carried out. An electron beam induced deposition (EBID) technique was used to grasp nano-materials and assemble them, enabling 2D and 3D manipulation to be easier to conduct. Experimental results show that this manipulator is possible to play an important role in enabling the technology of assembling nano-scale mechanical and electronic devices from prefabricated nano-scale components.

Abstract: Nanostructures materials have stimulated broad attention in the past decade because of their potential fundamental characteristics and its promising applications in nano electronic devices. In the present investigation, crystalline boron nanowires (BNWs) were synthesized by vapor liquid solid (VLS) technique and its mechanical properties were studied using a nanomanipulator inside a scanning electron microscope (SEM). Electron beam induced deposition (EBID) method was used to clamp boron nanowire to the AFM tips. The Young’s modulus of the NWs were determined from the buckling instability of NW and computed to be approximately 131.7 ± 14.6GPa. In addition, the nanomanipulation system was used to manipulate nanowire and built a nanoring.

Abstract: Electron beam induced deposition (EBID) was carried out with gas introduction systems attached to field emission scanning electron microscope (FE-SEM). Using iron carbonyl and ferrocene, three dimensional (3-D) antenna structures were fabricated in the range of 30-50 nm in diameter and 500-1000 nm in size. Post-deposition annealing of iron nanostructures resulted in the formation of crystalline alpha-iron and iron carbide phases. The iron concentration was controlled by the partial pressure of iron carbonyl and ferrocene. Electron holography observation with field emission transmission electron microscopy (FE-TEM) revealed that the remanent magnetic flux density Br of the nanostructures also depends on the iron concentration.