Authors: Jinh Young Lee, Jun Kil Hwang, Dong Joo Shin, Taesung Kim
Abstract: A comprehensive understanding of electrostatic-induced particle trapping during semiconductor wafer cleaning processes is paramount for enhancing device yield and performance. In this study, we employed a three-dimensional (3D) simulation framework to systematically analyze the interplay between electrical field strength, particle size, and electrostatic forces on particle trapping phenomena and defect pattern formation. Our findings revealed that increased electrical field strength and decreased particle size contribute to a higher probability of particle trapping and the emergence of distinct defect patterns. Based on these insights, we propose an optimization strategy to improve the cleaning process efficiency and minimize particle trapping, ultimately advancing the yield and performance of semiconductor devices.
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Authors: Mazlina Esa, Mohd. Khairul Hisham Ismail, Noor Asniza Murad, Nik Noordini Nik Abd. Malik, Mohd Fairus Mohd Yusoff, Shipun Anuar Hamzah
Abstract: There is an important need to investigate the enhancement of electrical field in visible and near infra-red region for a nanopatch antenna. This paper presents the relationship between metal thicknesses and electrical field with dedicated amount of dielectric material by using a typical design concept of a patch antenna. Two metal thicknesses have been considered, the radiating patch and ground layer. It was found that the decrement of electrical field can be clearly observed through parametric investigation of the metal thickness. Additionally, the resonance peak response is similar to an electrical field which decreases with increasing metal thickness. It can be concluded that the change of an antenna parameter is capable to control two properties for a desired application.
454
Authors: Jia Zhou, Xiao Long Tan, Wen Bin Wang
Abstract: Ellipse expression is difficult to be found directly. And the detail form which is important for electrical field analysis has not been described. The arrangement mode of lines affect electrical field significantly. Hence, simulation of triangular and horizon arrangement are proceeded in this paper. The terms include rotation track, rotation direction and initial phase angle.
1530
Authors: Sang An Ha, Byong Ho Jung, Jong Moon Lee, Kwon Hoo Kim, Jei Pil Wang
Abstract: The objective of this study was to increase flux and decomposition speed through the development of a multi-type electrical field decomposition facility that employs a more complex modulated electromagnetic field than that used in existing decomposition facilities where recalcitrant organics or heavy metals are combined together. Further, in this study, optimized foundational data was derived from the results obtained following field work. As a result, when an electrical field was applied to an electrolyzer, decomposition of the electrolyzer was carried out quickly, thereby showing higher efficiency because an electrical field was permeated to the contaminant faster compared to the case where an electrolyzer was not added. Keywords: Electromagnetic field, Heavy metal, Electrolyzer, Electrical field
514
Authors: Leyla Zeghichi, Leïla Mokhnache, Mebarek Djebabra
Abstract: The generation of plasmas and the initiation of electrical breakdown are realized by the phenomenon of electrical discharge which is provoked when we apply a sufficient electric field in a gas. Consequently the free charges are accelerated, new charged particles are created and others are destructed. This can be ranged in four phenomena: elastic collision (recombination), attachment, excitation and ionization. The aim of this paper is to study the basic phenomena in an electrical discharge in the case of Oxygen O2. Monte Carlo Simulation is used to follow the random trajectory of free charges determining in each path many parameters of the discharge. To determinate electrical and physical parameters, we have used the sampling laws. The spatial distributions of space charges (electrons, positive and negative ions) are also obtained. The determination of electrical field depends on distributions of charged particles obtained by solving the Maxwell equations.
211
Authors: Vladimir Ilich Sankin, Pavel P. Shkrebiy, Alla A. Lepneva, Andrey G. Ostroumov, Rositza Yakimova
Abstract: In materials with a small degree of ionicity ranging 10-15%, such as in SiC, carrier scattering on polar optical potential is possible. Unlike scattering on deformation potential, the drift mobility in this case increases continuously. As this phenomenon may be realized in SiC hot hole transport, I-F characteristics in 6H-SiC with Na-Nd ~ 5x1017 cm-3 have been studied at electrical field 1-150 kV/cm for temperature from 300 to 600K. Furthermore, we studied the breakdown of Al impurity.
307
Authors: Vladimir Ilich Sankin, Pavel P. Shkrebiy, Alla A. Lepneva, M.S. Ramm
Abstract: A natural superlattice (NSL) in silicon carbide polytypes is shown to introduce a
miniband structure into the conduction band, which leads to a number of effects in phenomena of
quantum-mechanical transport and impact ionization when the electric field directed along an axis
of NSL (axis C in crystal). These processes are absolutely traditional when the electric field is
perpendicularly to this axis. The parallel field phenomena are explained by the effects of the
Wannier–Stark localization (WSL) among them the Bloch oscillations effect is most prominent
today.
513
Authors: Vladimir Ilich Sankin, Rositza Yakimova
Abstract: The work deals with the highly important problem of the qualitative temperature
dependence of avalanche breakdown voltage in p-n junctions based on 4H-SiC. As it has been
shown before, the temperature coefficient of avalanche breakdown voltage (TCABV) is negative in
seven SiC polytypes, including 4Н-SiC. This effect has been explained by the Wannier-Stark
localization (WSL). It is worth noting that the plane of the investigated p-n junctions coincided with
the basal plane (0001). However the current SiC device technology prefers 4H-SiC p-n junction
formation on a plane that has 8о disorientation from (0001). This may result in a weakening of the
WSL and, correspondingly, in a positive TCABV. This problem has been elucidated in the present
paper. The photocurrent of 4H-SiC p-n junctions in a strong electric field has been scrutinized, that
has allowed to discover a negative differential conductivity region and it has testified to the WSL
process and negative TCABV.
707
Authors: Maxim V. Kuznetsov, Ivan P. Parkin, A. Kvick, S.M. Busurin, I.V. Shishkovskiy, Yuri G. Morozov
Abstract: New experimental methods for investigations of phase formation during SHS have been
established. First experiments using penetrating synchrotron radiation and energy dispersive
detectors for different classes of complex inorganic materials were carried out at ESRF (Grenoble,
France) and Daresbury (UK). A new and very sensitive thermal imaging method (Thermal Imaging
Technique (TIT)) based on continuous registration of the whole combustion process by using highly
sensitive IR-camera and software developed by MIKRON Instruments Co. (USA) was used for
precise registration of the combustion parameters. SHS was performed on different types of pure
and doped complex inorganic materials in pellet and powder form in a range of dc magnetic fields
up to 20 T and in electrical field strengths up to ±220 kV/m. The dc magnetic field was applied
during the reaction, supplied either by a permanent magnet (transverse, up to 1.1 T) or by an
electromagnet (longitudinal, up to 20 T). The dc electrical field was applied along the direction of
the combustion wave front propagation. The combined processes of SHS and SLS (Selective Laser
Sintering) of 3D articles for different powdered compositions were optimized with laser irradiation
power.
181
Authors: Seung Bok Choi, Kyung Su Kim
Abstract: This paper presents experimental results of tensile and compressive behaviors of smart electrorheological (ER) materials. Two different ER materials ; chemically treated starch particles and polymethylaniline particles are synthesized followed by devising a sqreeze mode type apparatus associated with motion controller and data acquisition system. The field intensity, electrode velocity and initial gap are chosen as important test parameters that influence on the tensile and compressive characteristics. The maximum tensile stresses are evaluated at each condition and compared between two ER materials.
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