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Papers by Keyword: High Rate Deposition

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High-Density Microwave Plasma-Enhanced Chemical Vapor Deposition of Crystalline Silicon Films for Solar Cell Devices

Authors: Hajime Shirai, Go Ohkawara, Masanobu Nakajima

109

Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films

Authors: A. Billard, C. Frantz

107