Articles by keyword: «High Rate Deposition»
2 papers on 1 page:
1
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High-Density Microwave Plasma-Enhanced Chemical Vapor Deposition of Crystalline Silicon Films for Solar Cell Devices
Published in: Polycrystalline Semiconductors VII (p109) -
Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films
Published in: Trends and New Applications of Thin Films (p107)