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Papers by Keyword: Intrinsic Gettering

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The Realization of Uniform and Reliable Intrinsic Gettering in 200mm p- and p/p- Wafers for a Low Thermal Budget 0.18μm Advanced CMOS Logic Process

Authors: M.J. Binns, A. Banerjee, R. Wise, D.J. Myers, T.A. McKenna

387

Efficiency of Intrinsic Gettering for Copper in Silicon

Authors: Seiichi Isomae, Hidetsugu Ishida, Toshihiko Itoga, Kazuyuki Hozawa

349

EBIC Characterization of Oxygen Precipitation and Denuded Zone in Intrinsically Gettered P-Type Czochralski Silicon

Authors: S. Spiga, Antonio Castaldini, Anna Cavallini, Maria Luisa Polignano, F. Cazzaniga

97