Papers by Keyword: Nano Metrology

Abstract: This paper develops a new separated mini-environment to provide a constant temperature chamber for the placement of Micro/Nano-metrology instrument. In this paper, the rule of temperature change with time under natural convection and coercive convection is presented. The measurement and control system is composed of TEC, programmable power source and precise temperature measurement system. The mathematic model of the constant temperature chamber is identified making use of system identification theory and system identification toolkit of MATLAB. The temperature stability is improved by applying auto-adaptive PID method. Experiments show that the temperature fluctuation of a single-point is less than 0.02°C and the whole field is within 0.05°C. The goal of high-precision temperature control is achieved.

Abstract: In this paper, we will present theory for nDSE (nano-scale Displacement Sensing and Estimation) and its application framework: IDMA (Indirect Displacement-Measurement-based Alignment). nDSE presents a clear and novel theoretical explanation to displacement sensing and estimation, especially down to the nano scale, a precision traditionally thought difficult or impossible to achieve because the displacements are below the wavelength of light and smaller than the pixel dimensions of practical observation systems. IDMA is an enabling framework based on nDSE to provide a new, low-cost, high precision overlay alignment for the challenging issue of nano scale alignment and metrology.

Abstract: The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.

Abstract: This paper presents a high precision AFM for nanometrology of large area micro-structured surfaces. A PZT with a stroke of 100 microns is used as the Z-directional actuator for the AFM cantilever. Two capacitance-type displacement probes are aligned at two sides of the PZT along the movement direction. The displacement as well as the tilt motion of the PZT can be accurately measured and compensated for based on the probe outputs. It was confirmed that the tilt motion of the PZT was approximately 32 arcseconds over the 100 micron stroke. The sample is moved by two linear stages for scanning in the X- and Y-directions over an area of 50 mm x 40 mm. The angular error motions of the stages that influence the AFM accuracy are measured by an autocollimator for compensation. A piezo-resistive cantilever, which can output the atomic force signal by itself, was employed instead of the conventional optical force sensing device for compactness of the AFM structure. A large area sinusoidal metrology surface has been successfully measured by the developed high-precision AFM.