Papers by Keyword: Optical MEMS

Abstract: Micro-Electromechanical Systems (MEMS) has been regarded as one of the most promising technologies for the 21st Century. Recently, some highlight areas attract great attention including Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. The state of arts on MEMS research in China is briefly introduced and research activities in Northwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexible substrate for MEMS integration, micro mirror, micro battery and three dimension measurement are demonstrated.

Abstract: Flat PZT cantilevers have been successfully fabricated from the Pt/Ti/PZT/Pt/Ti/SiO2/SOI multi-layered structure through MEMS technologies. A displacement of the tip of the cantilever driven at 6 V is measured to be 7.6 μm and the transverse piezoelectric constant calculated from the displacement is –103 pm/V. 1D optical scanners have been designed, simulated, fabricated and tested. The rotation angles of the mirror of the scanners were 60-70% of the simulated values.