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Papers by Keyword: PER Cleaning

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Advanced Aqueous Cleaner I, Dilute Solutions for the Selective Removal of Post Etch Residues in the Presence of Aluminium

Authors: Jerome Daviot, Chris Reid, Douglas Holmes

377

Copper Decontamination Ability of Supercritical-CO₂/Additives on CVD and Spin-On Porous MSQ Materials

Authors: Jerome Daviot, V. Perrut, F. Gaillard, C. Millet, Adrien Danel, Lucile Broussous, Didier Louis

327