Papers by Keyword: Post Dry Etch Cleaning

Paper TitlePage

Wet Cleaning of Trenches and Vias after Oxide/Nitride Dry Etch with Cu Exposed
Authors: Steven Verhaverbeke, Jason Chi-Hao Shao, Lewis Liu
311
Silicon Surface Cleaning after Spacer Dry Etching
Authors: Denis Shamiryan, Mikhail R. Baklanov, Serge Vanhaelemeersch
303
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