Papers by Keyword: Power MEMS

Abstract: By finite element simulation and experiment, this paper compares the performance of generators with magnetic material to generators without magnetic material (Fe) in its coil and analyzes the reason why there is difference between simulation results and experimental results. Experimental results present that under the same rotational speed, output voltage improves 60% with the addition of magnetic material in coil compared to generator without magnetic material in coil. We further discuss the feasibility to add magnetic material in coil, present the existed problems and improvement methods.

Abstract: Micro catalytic combustors are studied experimentally. Microchannels, coated with Pt catalytic walls and columns were fabricated to investigate microscale catalytic reaction. This microscale reaction enhancement by Pt catalytic surface area is characterized by increasing outlet gas temperature with the increase of surface-to-volume ratio. It is found that the reaction efficiency improvement by Pt catalytic columns will extend the operation conditions especially for smaller microchannel size.

Abstract: This paper presents an impact-based frequency increased electromagnetic vibration energy harvester to scavenge energy in a low frequency environment. To realize the novel impact based frequency up-conversion mechanism, a coil has been elastically anchored with a platform on which four permanent magnets are arranged in such a way that a strong closed magnetic flux path, linking the coil, is formed. The proposed scavenger has two dynamics of motion. The first phase is a low frequency oscillation to absorb energy from ambient vibration during which both the coil and magnet act as proof mass and move collectively. The increased proof mass ensures maximization of absorbed energy. After crossing a certain clearance, the platform containing magnetic setup rigidly and supporting the coil elastically, collides with a rigid stopper and bounces back. As a result of this mechanical impact a high frequency oscillation is setup in the coil relative to the magnets during which energy is transferred to electrical domain by electromagnetic induction. A macro-prototype has been build to prove the proposed concept. Initial test results show that the proposed harvester generates a peak voltage of 1 volt across a load of 220 Ω at an excitation frequency of 5 Hz which corresponds to a peak power of 4.5 mW and average power of 660 µW.

Abstract: Gas journal bearings, which are used to support radial loads in a rotating machine, have somewhat unusual requirements in Power MEMS deriving from the extremely shallow structures. With the reference Knudsen number being included, the modified Reynolds equation for gas journal bearings based on Burgdorfer’s first order slip boundary condition is put forward. The boundary condition for modified Reynolds equation is given. The numerical method is employed to solve the modified Reynolds equation to obtain the pressure profiles, load capacities and attitude angles of gas journal bearings for Power MEMS under different reference Knudsen numbers and eccentricity ratios. Numerical analysis shows that the pressure profiles and non-dimensional load capacities decrease obviously with the reference Knudsen number increasing, and the attitude angle changes conversely. Moreover, when the eccentricity ratio is smaller, the effect of gas rarefaction on the attitude angle is less.

Abstract: Micro-thermoelectric generator device (MTGD) is used to supply lasting electrical energy for Micro-electro-mechanical systems (MEMS). As an important part of MTGD, micro-combustor with high energy density has direct influence on the total electrical generating efficiency for MTG. D In this paper, Considering some parameters such as material, dimension, flux of fuel and shape of thermal conductive tunnel for micro-combustor, some simulation models such as thermal transfer, combustion for micro-combustor were built up, and some simulation results were got. Based upon, optimized micro flat combustors were designed and tested. The experiment results illustrated that the conduct efficiency of micro-combustor was well controlled by adjusting heat flux, and the combustor with shape of zigzag combustion tunnel has high thermal exchange efficiency in experiment models. By adjusting flux of fuel and the structure of micro premixed combustor, the heat loss of MTGD was reduced and output power was improved in a degree.

Abstract: The current research about Power-MEMS is mentioned. A micro turbine-generator system which aims to generate ultra-high power density at a high speed about 105r/min is put forward. Its work-principle is adequately introduced. The performance-tests of the turbine-generator are accomplished on a test-bench which has been specially designed. It can be seen that the micro turbine-generator system is able to generate about 0.6W output-power and a maximal voltage about 12.5V. Moreover, the turbine-generator is tested in four conditions in order to investigate how the pressure, volume flow and temperature of inlet gas affect the system’s performance.

Abstract: In recent years, there is an effort to develop a portable, autonomous micro power generation system to obtain an order of magnitude improvement in energy density over general alkaline or lithium ion batteries. As hydrocarbon fuels have much higher energy to weight ratios than general batteries, researches to realize micro-engines fueled by such hydrocarbon fuels are carried out in some universities or institutes. The first key problem of the researches is how to get a micro-engine structure suitable for MEMS (Micro-Electro Mechanical Systems) fabrication. This micro-engine structure needs characteristics such as planar geometry, self-valving operation and a minimal number of moving parts and so on. In this paper, a micro sliding rotary type combustion engine structure is presented and described. The intrinsic characteristics of the engine housing curve named of “kindred cardioids curve” are described in details. The structural scheme and cycle process of the micro-engine are discussed. Some performance parameters of the micro engine are theoretically calculated with H2-Air mixture and specified geometry parameters. The primitive calculated results indicate that the sliding rotary combustion engine is workable and effective.

Abstract: Micro-Electromechanical Systems (MEMS) has been regarded as one of the most promising technologies for the 21st Century. Recently, some highlight areas attract great attention including Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. The state of arts on MEMS research in China is briefly introduced and research activities in Northwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexible substrate for MEMS integration, micro mirror, micro battery and three dimension measurement are demonstrated.