Papers by Keyword: Scanning Probe

Abstract: We studied numerically and experimentally the possibility of the development of a novel probe based on the fiber Fabry-Perot interferometer with an evanescent light source protruding directly toward the sample. It was shown that such probe provides a spatial resolution ~λ/40 for λ=1550 nm. The fabrication process of such a probe is described in detail.

Abstract: The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the surface aspect of the mechanical and optical devices. In this paper, a novel cantilever with a 50μm-length-probe and self-sensing piezoresistor was designed; and based on the micro fabrication technology, the processes were planned. The dynamic and static characteristics of the cantilever were analyzed on theory and finite element method (FEM). The results show that the length of the probe has no effect on the cantilever’s dynamic and static performance.