Papers by Keyword: SiCN

Abstract: Fiber-like SiCN was found in the product from the nitridation of silicon by foaming and reaction sintering. The mixture slurry was comprised of silicon powder and cornstarch as raw material, yttrium oxide as sintering additive and some foams. The casted sample was sintered at 1650oC in nitrogen. The phase composition of the as-prepared sample was determined by X-ray powder diffractometer, and the microstructure of the sample was observed by scanning electron microscope and transmission electron microscope equipped with energy dispersive spectrometer. The results show that fiber-like SiCN with micron scale grown along [100] direction, and the interplanar spacing was 0.655 nm.

Abstract: The tribological properties of magnetron sputtered amorphous silicon carbide (a-SiC) and silicon carbonitride coatings (a-SiCN) with thickness of 2.2 and 3.4 µm were investigated. Samples were additionally annealed at temperature of 700°C or 900°C in air. Progressive load scratch tests were performed on the annealed samples as well as on the as deposited ones. An acoustic emission signal was detected during all tests using the sample holder with embedded sensor of our own design. Results indicate no change in wear resistance of SiCN sample after high temperature exposure up to 900°C, unlike in the tests of SiC coatings. Detection of acoustic emission generated during the scratch test proved to be a significant improvement for the coating evaluation.

Abstract: Full dense silicon carbonitride (SiCN) ceramics have been prepared successfully by thermally induced ceramisation of polysilazane precursor at 1000°C, and subsequently annealing at 1200°C. The density and the hardness of the obtained ceramics were about 2.61g/cm³ and 13GPa at the pyrolysis temperature of 1000°C, respectively. The density and hardness have a slight change with the increasing annealing temperature. This meas that the ceramics pyrolyzed at 1000°C were stable.

Abstract: We investigated the wet-etching properties of SiCN films using chemical agents. Our results show that sodium hydroxide, potassium hydroxide and phosphoric acid etch SiCN films, while hydrochloric acid, sulfuric acid, acetic acid, ammonium chloride and sodium chloride cannot etch SiCN films.

Abstract: Amorphous silicon carbide nitride (SiCN) films have been deposited in a dual ion beam sputtering deposition (DIBSD) using a SiC target. Films with various compositions were obtained by changing the nitrogen and argon gas ratio in the assisted ion source. Mechanical properties of the SiCN films were evaluated by Nano-indentation in N2 ambient. Surface morphology of the films was characterized by an Atomic Force Microscope (AFM). The microstructure and chemical bonding correlating with behavior of the films were studied by a Fourier transform infrared spectroscopy (FTIR) and a laser Raman spectroscopy. The results show that N2 proportion in the assisted ion source has a great effect on the structure and properties of the films and the mechanism was discussed in brief.

Abstract: The development of robust integration processes for low-dielectric-constant materials is critical in order to meet the ITRS timeline. For 45 nm and beyond, the roadmap dictates use of an advanced dielectric material with a bulk dielectric constant below 2.5. These materials are produced through the introduction of nanometer-scale porosity into an OSG skeleton. The pore size, morphology, and interconnectivity is controlled by the choice of OSG precursor, pore former, and process conditions. During integration, liquids can be absorbed into the pore network (e.g. during the polishing and cleaning process steps, resulting in a degradation of the electrical and mechanical properties [1-3]. The objective of this paper is to evaluate the impact of the CMP and post-CMP cleaning process steps on cohesive fracture in a porous OSG dielectric and the adhesive fracture of SiCN cap with porous OSG and copper films.

Abstract: Polymer-derived SiCN glasses with tailored polymer architectures were characterized by TEM and EF-SAED upon pyrolysis at 1000 °C and subsequent annealing. Main emphasis of this work was to verify as to whether the intrinsic amorphous structure of polymer-derived bulk materials exhibits different structural features upon pyrolysis, depending on the functionalities of the pre-ceramic polymer, and whether such characteristic features are maintained upon high-temperature anneal.

Abstract: Highly transparent silicon carbon nitride (SiCN) films were prepared by hot wire chemical vapor deposition (HWCVD) at low temperature as low as 40oC. Hexamethyldisilazane (HMDS) and NH3 were used as the source materials for SiCN deposition. The SiCN film prepared by only HMDS was completely transparent in the wavelength of the visible region. Moreover, there was a little absorption in the ultraviolet region. However, SiCN prepared by using HMDS and NH3 showed almost transparent both visible and UV regions.

Abstract: In this study, two-dimensional (2D) ordered macroporous SiCN ceramics were prepared by infiltrating sacrificial colloidal silica (SiO2) templates with the low molecular weight preceramic polymer, polysilazane. This was followed by a thermal curing step, pyrolysis at 1250°C in a N2 atmosphere, and finally the removal of the templates by etching with diluted HF. In particular, 100large-scale monolayer silica crystals were prepared on the cleaned Si substrates by spin coating. Two-dimensional SiCN ordered pore arrays were fabricated by a solution-dipping template strategy.

Abstract: Metal particles were embedded in a silicon carbonitride (SiCN) matrix, derived from the commercially available polysilazane Ceraset®. Metal powders, such as Fe, Mn, Co, Ni, were mixed and milled with pre-cross-linked polysilazane and subsequent pyrolysis. The metals act as active fillers to increase the density of composite. The phases and microstructures of metal/ceramic composites were studied using XRD, SEM and EDS. The magnetic property was measured with Magnetic Property Measurement System at –196oC and 27oC. The results show that there were two main domains in composites, one was metal-rich domain and another was metal-poor domain. The reaction compound between metal and matrix had great effect on the magnetic properties of composites, filled with different metals.