Papers by Keyword: Silicon Epitaxial Growth

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Quasi-Epitaxial Growth of Silicon Layers by Hydrogen Reactive Magnetron Sputtering at Temperatures as Low as 200 °C
Authors: Y. Leconte, Richard Rizk, F. Gourbilleau, P. Voivenel, M. Lejeune, C. Goncalves
65
Silicon Surface Cleaning for Low Temperature Silicon Epitaxial Growth
Authors: Masao Mayuzumi, M. Imai, S. Nakahara, Katsuya Inoue, J. Takahashi, Tadahiro Ohmi
229
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