Papers by Keyword: Symmetric AFM Probe

Abstract: The reliable reproducibility of nano patterns or other nano structures is one of many issues in the nano-imprint lithography process. An important prerequisite for reproducibility is suitable adhesion properties of adhesion promoters or anti-sticking layer. In this study, rhombus shaped symmetrical probe with a flat tip was developed and fabricated using MEMS fabrication technique. For the experimental setup of the adhesion test using a UV curable PAK01 resin coated AFM tip with several adhesion promoters, the flat tip is covered by PAK01 resist using micromanipulator. Anti-sticking layers of silane agents were prepared on the tip by vapor deposition method. Adhesion force between various adhesion promoters (GPTS, APMDS, APTS, DUV30J, O2 planairzation) and PAK01 resist and the force between anti-sticking layer (FOTS, DDMS) and PAK01 resist were evaluated using the force-distance mode of AFM. Adhesion force of GPTS and FOTS are about 7180 nN and 1660 nN, respectively.

Abstract: We have developed a novel atomic force microscope (AFM) probe as a highly sensitive sensor and an application of the probe into various mechanical tests for characterizing micro/nanostructures. Using MEMS fabrication technique, we have designed and fabricated rhombus-shaped symmetric AFM probe. Adhesion forces between silicon tip and artificial nano-hair structures of cyclic olefin copolymer (COC) and polypropylene (PP) were measured using the probe with a flat tip. The results exhibited the usual characteristics of force-displacement curves of COC and PP nano-hair structures, in which a pull-off force was detected at the point of unloading. The average adhesion forces of the COC and PP hair structures are about 9.48 μN and 10.67 μN, respectively.