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Papers by Keyword: Trenches

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Metrology and Removal of Nanoparticles from 500 Micron Deep Trenches

Authors: O. Guldiken, K. Bakhtari, Ahmed A. Busnaina, J. Park

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Defects and Contamination in Microelectronic Device Production: State-of-the-Art and Prospects

Authors: Bernd O. Kolbesen, Hans Cerva, G. Zoth

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