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Papers by Keyword: Vertical Reactor

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Growth of SiC Epitaxial Layers in a Vertical Cold Wall Reactor Suited for High Voltage Applications

Authors: Roland Rupp, A. Wiedenhofer, Peter Friedrichs, Dethard Peters, Reinhold Schörner, Dietrich Stephani

89

Characterization of Low Pressure Chemical Vapor Deposited Polysilicon Using Ellipsometry

Authors: L. Asinovsky, S. Fox, E. Karagiannis, M. Schroth, J.J. Sweeney

179