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Defect and Diffusion Forum
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Defect and Diffusion Forum
Vols. 138-139

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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 138-139

Defect and Diffusion Forum Vols. 138-139

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.138-139

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Table of Contents

Abstract Title Page

Si: Ion Bombardment and Point Defects

106

Si: Ion Bombardment, Surface Defects, and Surface Reconstruction

107

Si: Ion Implantation and Dislocations

108

Si: Ion Implantation, Dislocations, and Point Defects

109

Si: Ion Implantation, Dislocations, and Twins

110

Si: Ion Implantation, Dislocations, and Defect Annealing

111

Si: Ion Implantation and Point Defects

112

Si: Ion Implantation and Point Defects

113

Si: Ion Implantation and Point Defects

114

Si: Ion Implantation and Point Defects

115