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Defect and Diffusion Forum
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Defect and Diffusion Forum
Vols. 141-142

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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 141-142

Defect and Diffusion Forum Vols. 141-142

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.141-142

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Table of Contents

Abstract Title Page

Si: Surface Reconstruction

116

Si/SiGe: Dislocations

117

Si/SiGe: Dislocations and Surface Defects

118

Si-Ge: Dislocations and Point Defects

119

SiGe: Dislocations

120

SiGe/Si: Ion Implantation, Point Defects, and Defect Annealing

121

SiGe/Si: Dislocations

122

SiGe/Si: Dislocations

123

SiGe/Si: Dislocations

124

SiGe/Si: Dislocations

125