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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 150-151

Defect and Diffusion Forum Vols. 150-151

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.150-151

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Table of Contents

Abstract Title Page

Si: Ion Implantation and Point Defects

76

Si, SiGe, SiC: Ion Implantation and Point Defects

77

Si: Ion Implantation, Point Defects, and Defect Annealing

78

Si: Photon Irradiation and Point Defects

79

Si: X-Irradiation, Ion Implantation, and Point Defects

80

Si: Dislocations

81

Si: Dislocations

82

Si: Dislocations

83

Si: Dislocations and Point Defects

84

Si: Dislocations and Point Defects

85