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Defect and Diffusion Forum
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Vols. 218-220

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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 218-220

Defect and Diffusion Forum Vols. 218-220

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.218-220

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Table of Contents

Abstract Title Page

Si₃N₄/Si: Interface Defects

428

SiON: Point Defects

429

SiON: Point Defects

430

SiON: Point Defects

431

TaN: Cu Diffusion

432

TaN: Cu Thermodiffusion

433

TaN, TiN: Cu Diffusion

434

TaN: Point Defects

435

TiN: Cu Diffusion

436

TiN: Cu Diffusion

437