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Method of Forming Microchannels on the Surface of a Glass Substrate

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Abstract:

A method of forming arbitrarily shaped microchannels on substrates of brittle dielectric materials, such as optical glasses and optical crystals, is considered. This method makes it possible to ensure the identity of microchannel edges over the entire perimeter

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Periodical:

Materials Science Forum (Volume 1031)

Pages:

141-146

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.1031.141

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Online since:

May 2021

Authors:

Victor Bessmeltsev, Denis Katasonov*, Nikolay Goloshevsky, Sergey Baev

Keywords:

Femtosecond Laser Micromachining Technologies, Identical Microchannel Boundaries, Laser Micromachining of Brittle Materials, Profilometric Map

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© 2021 Trans Tech Publications Ltd. All Rights Reserved

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References

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