Solid State Phenomena Vol. 293

Abstract: The aim of this work was an attempt to verify two concepts of cathode modules, and the qualification of structure analysis of nitride coatings with the addition of silicon. The analysis covered one of the most commonly used in industrial conditions AlCrSiN coatings manufactured by the planar ARC and rotating (LARC^®) technology, which have recently gained more and more recognition in the production of coatings by physical vapour deposition (PVD) technique. Their microstructure was examined using transmission electron microscope (TEM), scanning electron microscopy (SEM), and atomic force microscopy (AFM). Their mechanical and tribological properties were compared in terms of their application in the field of surface engineering. Tribological tests were performed in sliding friction conditions using the ball-on-disc method, where a ceramic Al₂O₃ ball was used as the counterpart. Presented research results allow to determine the relationship between the structure, wear resistance, and the specific module responsible for the number, type and position of cathodes used in the constitution of the tested coatings. This study complements and contributes to the knowledge on the direct influence of the chemical composition of the coating and the method of its production on the quality and structure of the coated element for wear-resistant coatings produced by PVD in the arc evaporation method (AE).