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As a solution to this, hard mask is being used　[1]. a-C:H is one of such hard mask materials [2-5], because a-C:H films can be easily removed with oxygen [5, 6] and have high etching resistance.
Abadias et al., “Review Article: Stress in thin films and coatings: Current status, challenges, and prospects,” Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 36, no. 2, p. 020801, 2018, doi: 10.1116/1.5011790
Robertson, “Diamond-like amorphous carbon,” Materials Science and Engineering: R: Reports, vol. 37, no. 4–6, pp. 129–281, 2002, doi: 10.1016/S0927-796X(02)00005-0
Ohtake et al., “Properties and Classification of Diamond-Like Carbon Films,” Materials, vol. 14, no. 2, p. 315, 2021, doi: 10.3390/ma14020315
Freire, “Production and characterization of hydrogenated amorphous carbon thin films deposited in methane plasmas diluted by noble gases,” Materials Science and Engineering: B, vol. 112, no. 2–3, pp. 101–105, 2004, doi: 10.1016/j.mseb.2004.05.012

Papanicolaou, Shear strengthening of reinforced concrete members with textile reinforced mortar (TRM) jackets, Materials and Structures, 39 (2006) 93–103
Mazzoni, Experimental study of adhesion between FRCM and masonry support, Key Engineering Materials, 624 (2015) 189-196
Li, Failure mechanism investigation of continuous fibre reinforced cementitious composites by pull-out behaviour analysis, Procedia Material Science, 3 (2014) 1377-1382
Naaman, Bond stress model for fiber reinforced concrete based on bond stress-slip relationship, ACI Material Journal, 86 (1989) 45-47
Journal of Engineering Mechanics, 141(6) (2015)

And it distributed to energy materials and inorganic mineral recovery from sludge.
It also showed that, when materials arrived at the 3rd area, the majority of moisture has been already evaporated and the pyrolysis has begun.
The required calorie of materials was not large, and the pyrolysis has completed by and large.
Natural Science Journal of Xiangtan University, 2001, 23(2), 74-76
Journal of Hazardous Materials, 161 (2009) 1208–1215

Ultrasonic Electromagnetic Casting Complex Field Test Tested Materials.The Chemical composition of AZ31B magnesium alloy used in the experiment was shown in Table 1.
The Chinese Journal of Nonferrous Metals.Vol. 13(2),(2003), p.277-288.In Chinese
The Chinese Journal of Nonferrous Metals.Vol.14 (12),(2004),p.1977-1984.
Journal of Materials and Metallurgy.Vol. 2(3) ,(2003),p. 216-219.
Mechanical Engineering Materials.Vol. 34(8),2010,p. 12-14.

(4)Large numbers of combustible objects and materials were ignited
(vaporization heat is 1900kJ/kg) Ceilings The room partitions were COMBUSTIBLE CEILING TILE materials.
Tamkang Journal of Science and Engineering, Vol. 6 No. 3(2003), pp. 151-157
Journal Forensic Sci., Vol. 49 No.1 (2004), pp.1-4
[12] Central Police University Journal of Police Science.

Xian: submitted to Journal of Materials Processing Technology (2008) [11] Y.S.
Zhu: submitted to Journal of Materials Processing Technology (2008) [17] Q.F.
Han: submitted to Material Science and Engineering (2008) [19] T.
Gottstein: submitted to Material Science and Engineering (2008) [20] H.Y.
Chiu: submitted to Journal of Materials Processing Technology (2008) [21] A.

Material and testing procedures 1- Materials.
[2] Mohd Hilton Ahmad and Noor NM, Chemical Attack of Malaysian Pozzolans Concrete, journal of Science and Technology, (2009).
Durham, Beneficial use of recycled materials in concrete mixtures, Construction and Building Materials, (2012).
Supplementary Cementing Materials.
In press [16] Topculker Bekir and BilirTurhan, Effects of slag fineness on durability of mortars, Journal of Zhejiang University SCIENCE A, (2007).

At the fourth generation cell clouds, material was removed from and the extracts were ready to be used.
Science Vol. 260(1993), p. 920.� ��@ A.
Yang: Journal of Biomaterials Science-Polymer Edition.
Yang: Journal of Biomedical Materials Research: Part A.
Lin: Materials Letters Vol. 57(2002), p.858

It would be a waste of time, and a waste of human and material resources.
Acknowledgements Authors like to acknowledge Startup foundation of National Natural Science Foundation of China (Grant Nos.51105123), National Department Public Benefit Research Foundation (No. 201203072), Key Science and Technology Project of Hainan Province(No.
Journal of Gansu Agricultural University,2003, 38(4) :467-470
Jiangxi Forestry Science and Technology, 2005(2) : 24-26
Journal of Chongqing University, 2005, 11(2):23–26

With the development of computer technology, microelectronics and materials science, intelligent driving devices, such as ER damper, MR damper, artificial muscle and shape memory alloy appear.
Fig. 3 Relative knee joint angle tracking of A/K intelligent prosthesis to human healthy leg Fig. 4 Tracking error of knee joint angle Conclusion The research of A/K intelligent prosthesis integrates advanced technologies, namely mechanism engineering, electrical engineering, sensors, signal processing, control engineering, bioengineering, materials and intelligent prosthesis etc.
Journal of Hebei University of Technology, Vol.40 (2011) No.2, pp 6-9
Chinese Journal of Clinical Rehabilitation, Vol.8 (2004) No.5, pp 210-211
Key Engineering Materials, Vol.321 (2006), pp 156-160