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Numerical Simulation Study on Influence of Geometric Parameters of Spin-Coating Pallet on Wafer Deformation Ting-Xi Wu1,a, Jian Lu2,b, Qiang Wang1,c* 1School of Electronic and Information, Nantong University, Nantong, Jiangsu, 226019, China 2School of Electronic and Information, Jiangsu Vocational College of Business, Nantong, Jiangsu, 226019, China a1140296861@qq.com, b1561833576@qq.com, cwang_q@ntu.edu.cn Keywords: Spin-coating pallet; Wafer; Deformation; Numerical simulation Abstract.
Numerical simulations and experiments based on Fluent were carried out, including discussing geometric parameters of spin-coating pallet that affect wafer deformation.
In this paper, the numerical simulation experiments were carried out based on Fluent and the experiments of the geometric parameters of the spin-coating pallet that affect the 3-inch wafer deformation were investigated.
The effect of the geometric parameters of the spin-coating pallet on the wafer deformation was discussed by numerical simulations.
Wang: Computational Fluid Dynamics Analysis-Principle and Application of CFD Software (Tsinghua University Press, Beijing 2004).

FIDAP has been used due to the ability of rigorous computational fluid dynamics (CFD) code.
SIMULATION METHODS 2.1 Implementation of the rheological model in FIDAP.
The FE model use CFD code to obtain independent numerical results for the pseudoplastic and the rheopectic behaviour of bone cements.
Simulation was performed for a period of twelve minutes using the transient analysis option.
“A computational fluid dynamics simulation of PMMA cement flow upon insertion of a femoral stem into a bone cavity during a total hip prosthesis procedure”.

Later, a more complex code based on computational fluid dynamics applied to the simulation of fire development (Fire Dynamics Simulator - FDS) is used to allow a comparison between the numerical results obtained in either way, and to check to what extent some available experimental results concerning similar tunnels can be fitted.
Several models have been developed to simulate fire conditions in tunnels, ranging from simple analytical expressions to complex and computationally-demanding ``zone models'' and ``field models'', the latters based on computational fluid dynamics (CFD) [1].
Successively, a field model based on computational fluid dynamics - CFD applied to fire-development simulation - FDS is used (Pyrosim [5]).The use of CFAST is presented in some detail, as this code is based on the subdivision of a construction into compartments (but there are no compartments in a tunnel!).
A number of simulations were performed by means of CFAST for different values of the compartment length and for the same cross section.
Sharma: Numerical Simulation of Fire in a Tunnel: Comparative Study of CFAST and CFX Predictions, Tunnelling and Underground Space Technology, 2008, 23:160-170 [9] P.

The piezoelectric domain, structural domain and fluid domain are coupled in the simulation.
COMSOL Multi-physics and simulation analysis COMSOL Multi-physics.
Simulation and analysis.
All of the simulations are done in 2D models to evaluate pumpuing performance of the present micropump with respect to divergence angles of diffusers.
Przekwas: Coupled Fluid-Thermo-Structures Simulation Methodology for MEMS Applications (CFD Research Corporation) [7] J C Lotters, W Olthuis, P H Veltink and P Bergveld: The mechanical properties of rubber elastic polymer poly dimethylsiloxane for sensor application (J.

Numerical simulation for subcooled boiling flow process of high pressure liquid Zhou Aimin，Jiang Yong，Chen Jian，Wang ShiZhong Wuhan 2nd Ship Design and Research Institute，Wuhan 430064，China epe-zhouaimin@163.com Keywords: subcooled boiling；two-fluid model；void fraction；numerical simulation Abstract.
A numerical simulation has been performed for subcooled boiling process of high pressure liquid.
With the development of computer hardware, numerical methods and the multiphase flow models, some researchers have studied the water subcooled boiling flow process by the CFD tools.
Numerical simulation of subcooled boiling water in vertical concentric annulus under low pressure [J].
Numerical simulation for subcooled boiling process of liquid nitrogen in vertical tube [J].

Introduction The conventional computational fluid dynamics (CFD) methods are based on direct discretization of the Navier–Stokes equations.
The kinetic methods for CFD, however, are derived from the Boltzmann equation.
Due to their mesoscopic nature, kinetic methods are particularly appealing in modeling and simulations of complex fluids ‎[1].
In addition the results of the unsteady Couette flow simulation between two cylinders have been discussed.

Green Simulation and the Corresponding Modeling Method In the design field, product design is a very complicated work.
Take green building for example, green simulation and the corresponding modeling method is illustrated.
Now these problems have been fully taken into account in the design stage through fine analysis technique based on the computer numerical simulation.
green building construction plans architectural design electrical equipment professional design main structure professional design equipment construction simulation equipment operation simulation structural stress calculation structural construction simulation wind environment simulation energy consumption simulation light environment simulation acoustic environment simulation emergency processing simulation Fig.3 The computer-aided decision-making system of green building Green Monitoring and the Corresponding Monitoring Content In the past, people put more emphasis on the end of the pollutant control and treatment, while the whole process monitoring and prevention of pollutants are ignored.
Xiang, Application of numerical simulation technology in the design of green building, Focus of attention, 11(2013):26-31 [5] Z.

Hydrodynamic Performance Analysis of the Bionic Impeller Equipped with Little Angle Arc Lamina BAI Xiang-hua1, a, LV Jian-gang 2, b, Zhao Zhi-ning 3, c , 1,2,3Machine Engineering College，Shijiazhuang Hebei China 050003 abaixianghua@163.com Keywords：Lamina; Shape; Arc; Hydrodynamic Performance; Simulation Abstract：This paper mainly imagined and designed a bionic impeller with arc shape lamina especially little arc lamina, researched on its hydrodynamic performance on the base of the prior hydrodynamic performance research on straight panel shape lamina.
Fig.3 Impellers with different acr shape laminas Through analysing the features of different arc shape laminas, the paper mainly selected the impeller with little arc shape lamina (as shown in Fig.3-a, was 300 ) , and researched its hydrodynamic performance by FLUENT software simulation when its depth h is at -7.5 cm, 0 cm and 7.5 cm, discussed and analyzed the rules of hydrodynamics when h was altering, tamped the groundwork of optimizing the externality design of the bionic impeller further.
Simulation and Analysis Modeling and Simulation enactment.（1）First constructed three dimension sculpt of bionic impeller with little arc shape lamina and its depth h is at -7.5 cm, 0 cm, 7.5 cm, and then used GAMBIT software to actualize gridding partition, as shown in Fig.4.
In the simulation, adopted RNG onflow model, for this model has perfect performance to solve the hydrodynamic problem[4,5], Applied UDF to define the angle velocity of the bionic impeller as , and then initialized up-half part of control box as air and the other was liquid.
[4] Fujun Wang:The Theory and Application of CFD Software(Tsinghua University Press, Beijing 2004),in Chinese

Hydraulic simulation with the particle image velocimetry was adopted to verify the numerical simulation result.
Thus, to determine the velocity field before producing by numerical simulation is very important.
Experiment procedure A computational fluid dynamics (CFD) code, FLUENT, was employed for this study.
In addition, a simulation by PROCAST was conducted, to provide a comparison.
(b) (a) (a) The results in comarison with PIV and other numerical simulation methods; (b) The gate velocity in low pressure casting Fig. 2 Obtained results by PIV test and numerical simulation.

Employing the reverse engineering technology, the three-dimension LED heat sink entity was rebuilt and the heat transfer characteristics of LED heat sink were analyzed by CFD numerical simulation and experimental measurement.
Numerical Simulation.
In numerical simulation, the grid of LED heat sink was built by using Gambit software as shown in Fig. 1(b).
The test grid number was from 1,237,854 to 2,453,362 in the simulation.
In addition, according to the graph of relation, the simulation resultsget agreement with the experimental measuremental result, proving that the numerical simulation can be used to simulate the heat transfer characteristics of LED heat sink accurately.