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Citation & Copyright (to be inserted by the publisher ) Vertical Etching of Ru Electrodes using the O2/Cl2 System Hyoun Woo Kim � � � � School of Materials Science and Engineering, College of Engineering, Inha University 253 Yong Hyun Dong, Nam Ku, Incheon 402-751, Korea Keywords: Ru, Etching, Helicon Abstract.
Introduction As dimensions of devices are getting smaller and smaller, high dielectric materials, such as barium strontium titanate (BST), tantallium pentoxide (Ta2O5), need to be used for the fabrication of dynamic random access memory (DRAM) capacitors [1-4].
Although platinum (Pt) has been usually investigated as an electrode material, Pt had an etching problem.
Several research groups have reported that obtaining the sufficient etching selectivity of Pt to the mask material is very difficult [5-7].
Journal Title and Volume Number (to be inserted by the publisher) [9] W.

The school compiles teaching materials according to the level of education, education object and industry characteristics, and set up their own school-based curriculum, undertake to the student specialized environmental education systematically.
It is relying on the existing school curriculum teaching resources, teaching materials excavated in the teaching of various subjects, mining teaching materials in various subjects, when penetration environmental education, merging the environmental education and the various disciplines, through the professional course knowledge learning, a silent transforming influence of the educated, so that in the future professional work can take Corresponding environmental protection measures, so as to achieve the purpose of environmental protection.
Journal of Sichuan University of Science and Engineering, 2009, (S1): 36-39
Journal of Xi’an University of Post and Telecommunications, 2009, (1):26-30.

Preparation of Shaped Carbon Nanotube Composites with Porous Structures Nooshin Salman Tabrizi1,a, Maryam Yavari2,b 1,2 Materials and Energy Research Center, Imam Khomaini Blvd., MeshkinDasht, Karj, Iran as.tabrizi@merc.ac.ir, bmelika.yavari8@gmail.com Keywords: Carbon nanotube, Porous structures, Composites.
Experimental Details Materials.
Chemical Engineering Journal, 2011. 170(2-3): p. 395-410
Materials Letters, 2012. 79: p. 128-131
Journal of Zhejiang University SCIENCE A, 2009. 10(5): p. 716-724.

In repairing practice, discovered the crankshaft main failure reason were the journal cylindricity, roundness out-of-tolerance, the surface burns, the coherence, scratches, surface fatigue or bearing burning out.
Designed the Welding Process Welding Material and Equipment.
Welding material selected the JX-09-1 flux-cored wire, developed by the Wuhan ordnance noncommissioned officer school.
The attrition experiment was carried on the ML10 Shaw disc type material abrasion testing machine.
S Yao: Journal of Northeastern University (Natural Science), Vol. 29 (2008) No.5, p.693 (In Chinese)

The nanotubes must have a fixed configuration with the tensile film as the inner layer and the compressive film as the outer layer, as predefined by the lattice mismatch between the two constituting layer materials.
The mechanism is applicable to most kinds of materials.
For the nanotube with two material layers, any layer can be alternated as the inner one by change of adsorbed atoms type.
However, ambient temperature change would result in further bending owing to different thermal expansion coefficients of the two material films.
Acknowledgment This work was supported by the National Science Foundation of China (Grant No11072169 and 11072169) References [1] Prinz V Y 2003 Microelectron.

Made by loading activated carbon on nonwoven fabrics, this material can adsorb moisture and odorous gases and can be used in filters, veils, packing materials and so on.
The saturation time of adsorption material is defined as the time span when the adsorption efficiency of adsorption material decreases to 10%.
Acknowledgment This project support from technology plan of Science and Technology Agency of SiChuan Province（2012SZ0065） References [1] Jones A.
H, Journal of Non-Crystalline Solids ,Vol.242(1998),p. 69-80
S, Journal of Food Engineering,Vol. 53(2002),p.229-235.

Journal of Shandong Jiaotong University, 2013, 21(1):78-82.
Journal of Academy of Armored Force Engineering, 2011, 25(4):70-73.
Materials Science and Technology, 2011, 19(2):122-125.
Advanced Materials Research, 2013, (652-654):1427-1431
Advanced Materials Research, 2011, (291-294):1526-1531

But the mass density of the material tested by medical CT must be smaller than 3g/cm3.
In 1978, first EMI5005 scanning test was performed in one material laboratory in Berlin, Germany.
Acknowledgement This work was supported by the National Nature Science Foundation (50375126).
Bathias: Journal of Composites Technology & Research, Vol.22 (2000) No.1, pp.45-48
Guo: Journal of Mechanical Strength, Vol.23 (2001) No.1, pp.038-042

Secondly, the geometrical spreading, material damping and media scattering can also cause attenuation of amplitude and energy.
In the process of welding, the structure and organization of material have changed, and many interfaces formed.
Acknowledgment This project is supported by National Natural Science Foundation of China.
Journal of Offshore Mechanics & Arctic Engineering, 2000, 122(2): 65-71 [2] B.Peeters, J.Maeck, G.De Roeck.
Journal of Constructional steel research. 2003, 59: 695-712 [5] D.G.

Study of an Inorganic Ion Exchanger Mg2Ti1.25(PO4)3 Jinhe Jiang MicroScale Science Institute , Department of Chemistry and Chemical Engineering ,Weifang University, Weifang, 261061,China jiangjinhe2012@126.com Keywords: Mg2Ti1.25(PO4)3, Ion exchanger, Exchange capacity Abstract.
Introduction Lithium and its compounds are widely used in ceramics, medicine, air conditioning, catalysts, high-energy lithium battery and light aluminum alloy, etc., especially for the thermonuclear reaction, lithium is the essential raw material[1-2].
Distribution coefficient of MgTi-750(H)for alkali ions References [1] Z.S.Peng, Y.S.Yan, C.Y.Jiang, C.R.Wan, H.C.Gao: Advance on extraction lithium from salt lake, J.Chemistry Online. 1997, (12), 11 [2] Y.F.Liu, Q.Feng, Kenta Ool: Li extraction/insertion reaction with LiAlMnO4 and LiFeMnO4 spinels in the aqueous phase, J.Journal of Colloid and Interface Science . 1994, 163(1), 130 [3] D.Q.Dong, J.Zhong, D.L.Liu, Y.F.Liu: LiCu0.5Mn1.5O4 synthesis and Li+ extraction/reaction with it in the aqueous phase, J.China Journal of Applied Chemistry . 1998, 15(3), 11 [4] D.Q.Dong, F.B.Zhang, G.L.Zhang, Y.F.Liu: LiMg0.5Mn1.5O4 synthesis and its selectivity to Li+ exchange, J.Chinese Journal of Inorganic Chemistry. 2004, 9(9), 20