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Mehregany Department of Electrical Engineering and Computer Science Case Western Reserve University, Cleveland, Ohio 44106, USA Keywords: LPCVD, Poly-SiC, Residual Stress, Surface Micromachining, MEMS Abstract: This paper reports the development of a high-throughput, LPCVD reactor and processes for depositing low residual stress, low stress gradient poly-SiC on large area substrates.
Introduction SiC is well known for its excellent material properties, making it an outstanding addition to the microelectromechanical systems (MEMS) technology material toolbox.
Journal Title and Volume Number (to be inserted by the publisher) 3 The residual stress depends on deposition temperature, resulting in compressive films for a deposition temperature of 800°C, but very highly tensile films for a deposition temperature of 900°C.

Journal Citation (to be inserted by the publisher) Copyright by Trans Tech Publications Two-Photon Resonant Third Order Harmonic Generation from Atoms and Ions Interacting with Intense Short Laser Pulses Young Soon Kim 1, Jung-Seock Choi1, Baek Il Nam 1, Moon-Gu Baik2, Takako Kato 3, Izumi Murakami3, Richard M.
More 3 1 Department of Physics, Myongji University, Yong-In, 449-728, Korea, yskim@mju.ac.kr 2 Dept. of Physics, Kyungwon University, Seongnam, 461-701, Korea, mgbaik@kyungwon.ac.kr 3 National Institute for Fusion Science, Oroshi, Toki, Gifu, 509-5292, Japan, takako@nifs.ac.jp Keywords: resonant ionization, high-order harmonic generation, intense field.
Third order harmonic generation is relatively well understood in ordinary nonlinear optics where solid-state materials are used and the laser intensity used is not as big as that in the case of HHG; we will consider the third order harmonic generation from atoms or ions in a gaseous state.

Acknowledgement This work was supported by the National Natural Science Foundation of China (50775033) and Main Project of Ministry of Education (108145).
(Chemical Industry Press, China 2003) (in Chinese) [2] Zhuo Meng, JingJing Sun, Tingze Zhou and Shuiheng Gu: Key Engineering Materials.
Vol. 375-376(2008), 724-728 [3] Phillips, Kristie J: Textile Research Journal.

ERP project is complicated system engineering, it needs the large investment of both software and hardware, and needs the long-term investment of manpower, materials and intellectual.ERP requires business processes of enterprises to restructure, need to reform the organizational structure of enterprises if necessary.
Wan: Science and Technology Management Research (In Chinese), Vol. 26 (2006) No.8, p.202-203
Wang: Journal of Bohai University (In Chinese), Vol. 26 (2004) No.4, p.75-77.

Control system of significant importance might have to be separately located in metal screen cabinet made of low resistance materials such as copper foil, to completely eradicate control misoperation brought by electromagnetic interference.
Journal of Xinxiang University (Natural Science Edition), 2003, 30(01):52-54

Experiment Experimental equipment and materials CO2 high pressure cylinders, N2 high pressure cylinders, high pressure constant speed constant pressure pump(HXH-100B), measurement points sand tube model, high-pressure vessel, automatic pressure measuring device, gas flow meter, thermostat, back-pressure valve core holder.
Acknowledgements This work was financially supported by the National Natural Science Foundation (50804052).
Oil&Gas Journal, 2002, 8, 53 -65

Large-Scale Text Clustering based on Improved K-means Algorithm in the Storm Platform Shenghang Wu1, a, Zhe Wang2, b, *, Mingyuan He1, c, Huailin Dong1, d 1School of Software, Xiamen University, Xiamen 361005, China 2Department of Electronic Science, Xiamen University, Xiamen 361005, China a406735102@qq.com, b1328028747@qq.com, c529550818@qq.com, dhldong@xmu.edu.cn Keywords: Storm Platform; Distributed K-Means Clustering; Large-Scale Text; Abstract.
References [1] Dusi M, d'Heureuse N, Huici F, et al.: Flexible and High-Performance Big Data Stream Analytics Platform and its Use Cases, NEC TECHNICAL JOURNAL, Vol. 7 (2012) No. 2, p. 103
Hong: Massive Data MapReduce Fingerprint Discriminant Algorithm Based on Hadoop, Applied Mechanics and Materials, (2013) No. 263, p. 2655-2660

This is mainly due to the mismatch in the CTE (coefficient of thermal expansion) among different materials that construct an electronic package, such as silicon chip, metals, polymers and so on [1].
Nishi: Journal of Japan Institute of Electronics Packaging, Vol. 5 (2002), p. 23 (in Japanese) [4] Y.
XXVI (Science Publishers, 1988), p. 349

Being a management philosophy, ERP is a software system that is the crystal of modern information technology and modern management techniques, covering order management, materials management, warehouse management, quality management, cost management, technology management, market forecasting, production planning, financial management, human resources management and other aspects in modern business.
Education Research Journal, vol.11,1996,pp. 73-81
Beijing: Education Science Press, 2004, p.7.

Mechanics of Materials.
Journal of Zhejiang University: Engineering Science. 2006,40(9):1633-1637(In Chinese)