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Investigation of Defect InP(001) Surface by Low Energy Ion Scаttering Spectroscopy

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Abstract:

In this paper presents the computer simulation results on the investigations of the ion scattering processe on the defect InP(001)<110>,<ī10> surface under low-energy grazing ion bombardment have been presented. The peculiarities trajectories of the scattered ions from surface defect, atomic chain and semichannel have been investigated by computer simulation. It was found some trajectories nearby surface atomic chain which have loop shape and a line form. At grazing ion incidence, from a correlation of the experimental and calculated energy distributions of the scattered particles, one may determine a spatial extension of the missing atom on the monocrystal surface damaged by the ion bombardment.

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Periodical:

Materials Science Forum (Volume 1049)

Pages:

192-197

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.1049.192

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Online since:

January 2022

Authors:

Muxtor K. Karimov*, F.O. Kuryozov, Sh.R. Sadullaev, M.U. Otabaev, S.B. Bobojonova

Keywords:

Computer Simulation, Defect, Energy Distribution, Ion Scattering, Semichannel

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© 2022 Trans Tech Publications Ltd. All Rights Reserved

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