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Characteristics of Indium Oxide Rod-Like Structures Synthesized on Sapphire Substrates

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Abstract:

In2O3 materials consisting of dense arrays of vertically aligned rod-like structures were deposited on sapphire substrates by thermal chemical vapor deposition (CVD) using triethylindium (TEI) and oxygen as precursors at a substrate temperature of 350 oC. The rod-like structure with a triangular cross section had a cubic structure, exhibiting preferred crystallographic orientation in the [111] direction. The photoluminescence spectra of In2O3 structures under excitation at 325 nm revealed a visible emission.

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Periodical:

Materials Science Forum (Volume 518)

Pages:

143-148

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.518.143

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Online since:

July 2006

Authors:

Hyoun Woo Kim, Ju Hyun Myung, S.H. Shim, Woon Suk Hwang

Keywords:

Chemical Vapor Deposition (CVD), Indium Oxide

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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