Paper Titles
A Novel Fabrication Method for Mold Insert of Injection Molded Microlens Array
p.665
The Solving Methods of Dwell Time or Pressure in CCOS for Optical Complex Surfaces
p.669
Study on the Tool Path Generation of an Automotive Headlamp Reflector in Ultra-Precision Raster Milling
p.673
Synthesis and Analysis of 4-DOF Parallel Manipulator with Passive Subchain
p.677
Temperature and Humidity Effects on Micro/Nano Handling
p.681
Convenient Method to Fabricating Complicated Microstructures on Thermoplastics
p.685
An Investigation of Form Compensation in Fabricating Microlens Arrays by Ultra-Precision Fast-Tool-Servo Technology
p.689
A Study of a Digital Manufacturing Procedure for Freeform Optics
p.693
The Effect of Up-Cutting and Down-Cutting Directions on Materials Swelling in Ultra-Precision Raster Milling
p.697

Temperature and Humidity Effects on Micro/Nano Handling

Article Preview

Abstract:

Micro/nano handling is an important enabling technology for future manufacturing. In the micro scale, adhesion is a severe problem for efficient and accurate handling tasks. The cause of the adhesion is largely from the microforces, namely van der Waals, electrostatic and capillary forces. Those forces, however, are functions of ambient environmental conditions. This paper exams two important ambient environment parameters in normal micro/nano handling environment: temperature and humidity, in both theoretical analysis and experimental studies. A short guideline for microhandling with temperature and humidity consideration is suggested based on the studies.

You might also be interested in these eBooks
Advances in Materials Manufacturing Science and Technology II View Preview

Info:

Periodical:

Materials Science Forum (Volumes 532-533)

Pages:

681-684

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.532-533.681

Citation:

Cite this paper

Online since:

December 2006

Authors:

Quan Zhou, Bo Chang, Heikki N. Koivo

Keywords:

Environment Effects, Humidity, Micro/Nano Handling, Micromechatronics, Temperature

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2006 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] J. Israelachvili: Intermolecular and Surface Forces, 2 ed (Academic Press, London 1992).

Google Scholar

[2] X. Tian and B. Bhushan: J. Phys. D: Appl. Phys., Vol. 29 (1996), p.167.

Google Scholar

[3] ISPWS Release on Surface Tension of Ordinary Water Substance (Int. Assoc. Properties of Water and Steam, 1994).

Google Scholar

[4] M.D. Ruijter, P. Kolsch, M. Voue, J. De Coninck and J.P. Rabe: Colloids and Surfaces, A: Physicochem. and Eng. Aspects, Vol. 144 (1998), p.235.

Google Scholar

[5] J. Frenkel: Kinetic Theory of Liquids (Oxford Univ. Press, London and New York 1949).

Google Scholar

[6] T. Eastman and D.M. Zhu: Langmuir, (1996), p.2859.

Google Scholar

[7] B. Chang, Q. Zhou and H.N. Koivo: Proc. 2nd VDE World Microtechnologies Cong., MICRO. tec 2003, (2003), p.89.

Google Scholar

[8] N.S. Tambe and B. Bhushan: Nanotechnology, Vol. 15 (2004), p.1561.

Google Scholar

[9] A. Einsten and L. Infeld: Evolution of Physics (Simon and Schuster, New York 1967).

Google Scholar

[10] S. Khan: http: /www. dupont. com/thermount/pdf/comparison. pdf, (1999).

Google Scholar

[11] Hyperphysics: http: /hyperphysics. phy-astr. gsu. edu/hbase/tables/diel. html, (2006).

Google Scholar

[12] J.M.M. Perez and C. Freyre: Sensors and Actuators B, Vol. 42 (1997), p.27.

Google Scholar

[13] H.D. Ackler, R.H. French, and Y.M. Chiang: J. Colloid and Interface Sci., Vol. 179 (1996), p.460.

Google Scholar

[14] R.H. French: J. American Ceramic Society, Vol. 83 (2000), p.2117.

Google Scholar

[15] Piezosystems Inc.: http: /www. piezo. com/tech3faq. html#app13, (2006).

Google Scholar

[16] http: /www. physikinstrumente. de/products/prdetail. php?secid=4-38, (2006).

Google Scholar

[17] S. Vorndran: EuroPhotonics, Feburary/March Issue, (2003), p.31.

Google Scholar

[18] Q. Zhou, A. Aurelian, B. Chang and et al: J. Micromechatronics, Vol. 2 (2004), p.227.

Google Scholar

[19] Q. Zhou, C.D. Corral, P.J. Esteban and et al: Proc. 2002 IEEE/RSJ Int. Conf. on Intelli. Robots and Sys., IROS'02, (2002), p.1760.

Google Scholar

[20] P. Ronkanen, P. Kallio, Q. Zhou and H.N. Koivo: Proc. 2nd VDE World Microtechnologies Cong., MICRO. tec 2003, (2003), p.323.

Google Scholar