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Recognition of MEMS Microstructure Feature Based on Pattern Analysis and Classification

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Periodical:

Key Engineering Materials (Volumes 364-366)

Pages:

555-559

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.364-366.555

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Online since:

December 2007

Authors:

Kai Hu, Xiang Qian Jiang, Xiao Jun Liu

Keywords:

Hough Transform (HT), Micro-Electromechanical System (MEMS), Microstructure, Pattern Analysis

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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References

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