Paper Titles

Impact of Defects on the Technology of Highly Integrated Circuits
p.1

Defects and Future Semiconductor Devices
p.13

Configurations and Properties of Hydrogen in Crystalline Semiconductors
p.25

Defect Metastability and Bistability
p.39

The EL2 Defect in GaAs
p.51

Magneto-Optical and ODMR Investigations on Intrinsic and Extrinsic Defects in GaAs
p.59

Defects Induced by Reactive Ion Etching (RIE) in GaAs and Correlation with EL2
p.67

ESR-Spectra of Defects in Plastically Deformed GaAs
p.73

HomeMaterials Science ForumMaterials Science Forum Vols. 38-41Defects and Future Semiconductor Devices

Defects and Future Semiconductor Devices

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Defects in Semiconductors 15

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Periodical:

Materials Science Forum (Volumes 38-41)

Pages:

13-24

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.38-41.13

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Online since:

January 1989

Authors:

D.V. Lang

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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