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HomeMaterials Science ForumMaterials Science Forum Vols. 54-55Thin Film Boron Nitride for Semiconductor...

Thin Film Boron Nitride for Semiconductor Application

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Synthesis and Properties of Boron Nitride

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Periodical:

Materials Science Forum (Volumes 54-55)

Pages:

329-352

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.54-55.329

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Online since:

January 1990

Authors:

E. Yamaguchi

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© 1990 Trans Tech Publications Ltd. All Rights Reserved

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