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SiC Power Devices on QUASIC and SiCOI Smart-Cut® Substrates: First Demonstrations

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Periodical:

Materials Science Forum (Volumes 433-436)

Pages:

813-818

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.433-436.813

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Online since:

September 2003

Authors:

Fabrice Letertre, Francois Templier, N. Daval, Edwige Bano, Dominique Planson, Lea Di Cioccio, E. Jalaguier, Jean Marie Bluet, Thierry Billon, Roland Madar, Jean-Pierre Chante

Keywords:

CVD Epitaxy, QUASIC, Schottky Diode, SiCOI, Silicon Carbide (SiC), Smart-Cut®, SOI, Wafer Bonding

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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References

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