Paper Titles
The Role of Special Boundaries during Solidification and Microstructure Evolution in Lead Free Solder Joints
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Texture Studies on Borocarbide Thin Films
p.1425
Thermomechanical Properties of Nickel Silicide: Dependence on the Microstructure
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Cube Texture Formation in P/M Ni, Ni-W and Ni-Mo Alloy Tapes for Coated Superconductor Applications
p.1437
Orientation and Microstructure Dependence of Electromigration Damage in Damascene Cu Interconnect Lines
p.1443
New Interpretation of the Influence of Various Parameters on Texture Evolution in Damascene Cu Interconnect Lines
p.1449
Quantitative Texture Analysis of Electrodeposited Line Patterns
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The Influence of Palladium Addition on the Texture Transition in Silver
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Investigation of Local Texture Correlations in Bi-2223 High Temperature Superconductor Tapes
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Orientation and Microstructure Dependence of Electromigration Damage in Damascene Cu Interconnect Lines

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Abstract:

In the present paper we report the texture and microstructure dependence of electromigration damage in Cu interconnects. This was made possible by ncorporating a sophisticated set of instrumentation within the SEM which enabled in-situ monitoring of the electromigration defects. The electron backscatter diffraction (EBSD) maps were obtained before and after the completion of the electromigration tests. Thus, by comparing the maps before and after the failure it was possible to associate the texture and microstructure with both failure sites - voids and hillocks. Results from lines down to 130 nm are included and orientation dependence of the defects is discussed.

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Periodical:

Materials Science Forum (Volumes 495-497)

Pages:

1443-1448

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.495-497.1443

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Online since:

September 2005

Authors:

Kabir Kumar Mirpuri, Jerzy A. Szpunar

Keywords:

Cu Damascene Technology, Electromigration, Electron Backscatter Diffraction (EBSD), Interconnect, Microelectronic Chip, Orientation Image Microscopy (OIM), Texture

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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References

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