Key Engineering Materials Vol. 503

Abstract: This paper presents a method of low temperature wafer level adhesive bonding using non-photosensitive bisbenzocyclobutene (BCB) from Dow Co for resonant pressure sensor package. The bonding process is performed at the temperature below 250oC, with the pressure on the wafer 2-3 Bar in vacuum in a wafer bonding system. According to the bonding process, pre-bake time, pumping time, pressure placed on the sensor and the thickness of cross-linked layer are the most important factors. Experiments show that more than 95% of the area is successfully bonded, the hermeticity maintains well after thermal shock and long term tests, and the tensile strength of the fabricated bonds is up to 40MPa. The bonding technique was successfully tested in the fabrication process of resonant pressure sensor, and the results show that this bonding technique is a viable MEMS encapsulation technology for hermetically cavity sealing.

Abstract: An electrochemical seismic sensor (ECSS), which consists of interdigital electrodes immersed in electrolyte solution, based on MEMS technology is studied theoretically and experimentally in the paper. The output current of the sensor is employed to measure the ground motion. The device has a small size, simple design and fabrication process with low cost. Preliminary test results show that the novel electrochemical seismic sensor has satisfactory characteristics.

Abstract: A new type of plastic micro heat radiators is designed in this paper. The radiator is prospected to be used in electronic system, chemical engineering system, etc. It is made of modified Phenylene sulfide with high thermal conductivity. A series of numerical simulations are carried out to optimize the structure of the radiator. The structure of the radiator includes the thickness of the fin and the distance between fins. The results show that the performance of the micro plastic heat radiator is very close to that of the metal heat radiator with the same dimension.

Abstract: A novel miniaturized piezoelectric wind flutter generator is proposed which consisted of a flexible beam and a PZT cantilever. The working principle is based on flexible beam flutter, which can amplify the PZT cantilever vibration. A prototype was tested in a wind tunnel. It is found that there are three behavior states with wind speed increasing, and flutter behavior takes place when wind speed varies between the critical wind speed U_c1 and U_c2, an empirical formula was obtained about the critical speed U_c1. The open circuit voltage and power were measured. The device can generate 794μW output power with 30kΩ resistor in a wind of speed 20m/s, power density is 139μW/cm³.

Abstract: Petroleum prospecting and early warning of some geological disaster increasingly depend on the accelerometers which can detect vibrate of frequency below 1Hz, but it’s embarrassing that accelerometers based on Si or SiO2 structure make an awful performance in this frequency range. Electrochemical accelerometers were developed in 1990s. With fluidics to be inertial mass, electrochemical accelerometer not only show an excellent property in low frequency, but also has a wide dynamic range. However, traditional fabrication process of electrochemical accelerometer is rather complex and can’t eliminate the noise due to the inconsistency and asymmetry of electrodes. To solve these problems, a scheme based on MEMS is proposed here, including design, fabrication and package. Properties of electrochemical accelerometer (EAM) are tested in two conditions at last.

Abstract: An ice detection system consisting of a resonant piezoelectric sensing-element and closed-loop circuit has been developed to automatically and distinctly sense ice films up to 1.3 mm thick. Accretion of ice and/or water on the sensor surface modifies the effective mass and/or stiffness of the vibrating transducer; these variations are sensed by measuring the changes in transducer resonant frequency. In case of ice films, resonant frequency of the transducer increases steadily from 60.9 kHz with no ice to 131.5 kHz when the ice film is 1.3mm thick. The time and temperature stability experiments revealed frequency variety no more than 1 kHz. The resolution of this sensor is better than 0.06mm.

Abstract: Dynamic and static performances are the most important parameters for accelerometers. The natural frequency decides the sensor’s working frequency band, and the accompanying stress represents the measurement sensitivity. In this paper, a novel sensing structure, cantilever-membrane structure, for piezoresistive accelerometers is studied, in order to detect the structural dimension’s effect on the sensor. With the help of FEM (Finite element method) software, the first order natural frequency of the cantilever-membrane based accelerometer is investigated with the different combinations of membrane’s dimensions. The accompanying stress of the sensing structure is also simulated in this paper. The results show that the membrane’s dimensions affect the frequency and stress more tempestuously when the membrane is short, but the tendency become gentle when the width of the membrane increases.

Abstract: A thermal equivalent model based on Fourier equation is introduced to optimize a thermoelectric microwave power sensor in this paper. The different distance between the load resistor and thermopile is considered carefully to obtain good matching characteristic and high sensitivity characteristic. The sensitivity of the thermoelectric power sensor has been chosen as a goal function with the distance, the length of thermopile and the number of thermopiles as independent variables. The simulation results show that the sensitivity of the power sensor decreases with the distance, but increases with the length and the number of thermopiles. Then the input matching characteristic of this thermoelectric power sensor with different distance are simulated with HFSS. The power sensor has a good performance on sensitivity characteristic and input match characteristic with an optimization distance is about 10μm.

Abstract: Pb0.97La0.02(Zr0.95Ti0.05)O3 antiferroelectric thick films were prepared on platinized silicon substrates by sol–gel methods. Films showed polycrystalline perovskite structure with a strong (100) preferred orientation. The antiferroelectric nature of the films was confirmed by the double hysteresis behaviors versus applied field. The temperature dependence of dielectric constant and loss displayed the Curie temperature was 225oC.The current caused by the polarization and depolarization of polar was detected at coupling application of electric field and temperature. The phase transition characterization could be effectively adjusted by electric field and temperature.

Abstract: A new manufacture mainly for polymethyl methacrylate (PMMA) microfluidic chips is presented in this paper. In this technique, polymer microfluidic microchannels were fabricated by microcutter which temperature is controlled and stabilized by PID methord. There are so many techniques, such as hot embossing, laser direct-write, for mass-production of polymer microfluidic chip. However, we may feel different kinds of shortages when we use these techniques. In this paper, the experiment result shows that microcutter’s movement velocity and temperature have effert on microfluidic microchannel’s roughness.