Micro-Nano Technology XIII

Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor

Authors: Yu Xin Li, De Yong Chen, Jun Bo Wang

Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes

Authors: Guang Bei Li, De Yong Chen, Wen Tao He, Jun Bo Wang

Optimal Design of Micro Plastic Heat Radiator

Authors: Yue Han, Ya Jun Zhang, Da Ming Wu, Jian Zhuang, Kai Fang Dang

A Miniaturized Piezoelectric Wind Flutter Generator

Authors: Xing Qiang Zhao, Zhi Yu Wen, Zhi Gang Du

Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS

Authors: Wen Tao He, De Yong Chen, Guang Bei Li, Jun Bo Wang

A Flush-Mounted Resonant Ice Detection Sensor with High Sensitivity

Authors: Qiang Shi, Jun Bo Wang, De Yong Chen, Yan Long Shang

Simulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers

Authors: Yan Liu, Yu Long Zhao, Lu Sun

Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology

Authors: Tong Liu, Xiao Ping Liao

Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O₃ Antiferroelectric Thick Films

Authors: Xiu Jian Chou, Miao Xuan Du, Yong Bo Lv, Jun Liu, Wen Dong Zhang

Heating Carve Technique for Polymer Microfluidic Microchannel

Authors: Xiao Wei Han, Wei Wang, G.H. Ye, Xiao Wei Liu, Li Tian, Zhi Gang Mao