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HeteroSiC & WASMPE 2011

Volume 711
doi: 10.4028/www.scientific.net/MSF.711
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Preface, Sponsors and Committees

Progress in 3C-SiC Growth and Novel Applications

Authors: Rositza Yakimova, Remigijus Vasiliauskas, Jens Eriksson, Mikael Syväjärvi

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Elimination of Twin Boundaries when Growing 3C-SiC Heteroepitaxial by Vapour-Liquid-Solid Mechanism on Patterned 4H-SiC Substrate

Authors: Jean Lorenzzi, Nikoletta Jegenyes, Mihai Lazar, Dominique Tournier, Davy Carole, François Cauwet, Gabriel Ferro

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CVD Growth of 3C-SiC on 4H-SiC Substrate

Authors: Anne Henry, Xun Li, Stefano Leone, Olof Kordina, Erik Janzén

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The Influence of C3H8 and CBr4 on Structural and Morphological Properties of 3C-SiC Layers

Authors: Giovanni Attolini, Matteo Bosi, Bernard Enrico Watts, Gábor Battistig, László Dobos, Béla Pécz

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Structural Characterization of Heteroepitaxial 3C-SiC

Authors: Andrea Severino, Ruggero Anzalone, Massimo Camarda, Nicolò Piluso, Francesco La Via

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Consideration on the Thermal Expansion of 3C-SiC Epitaxial Layer on Si Substrates

Authors: Andrea Severino, Massimo Camarda, Antonino La Magna, Francesco La Via

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Epitaxial Growth of 3C-SiC onto Silicon Substrate by VLS Transport Using CVD-Grown 3C-SiC Seeding Layer

Authors: Stéphane Berckmans, Laurent Auvray, Gabriel Ferro, François Cauwet, Veronique Soulière, Emmanuel Collard, Jean Baptiste Quoirin, Christian Brylinski

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Study of 3C-SiC Mechanical Resonators, Filters and Mixers

Authors: Enrico Mastropaolo, Rebecca Cheung

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Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application

Authors: Ruggero Anzalone, Giuseppe D'Arrigo, Massimo Camarda, Nicolò Piluso, Andrea Severino, Francesco La Via

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