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Papers by Author: A. Delabie

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Surface Preparation Techniques for High-k Deposition on Ge Substrates

Authors: Sven Van Elshocht, A. Delabie, B. Brijs, Matty Caymax, Thierry Conard, Bart Onsia, Riikka Puurunen, Olivier Richard, Jan Van Steenbergen, Chao Zhao, Marc Meuris, Marc Heyns

On the Application of a Thin Ozone Based Wet Chemical Oxide as an Interface for ALD High-k Deposition

Authors: Bart Onsia, Matty Caymax, Thierry Conard, Stefan De Gendt, F. De Smedt, A. Delabie, C. Gottschalk, Marc Heyns, M. Green, S. Lin, Paul W. Mertens, W. Tsai, Chris Vinckier

Open Circuit Potential Analysis as a Fast Screening Method for the Quality of High-k Dielectric Layers

Authors: Martine Claes, T. Witters, G. Loriaux, S. Van Elshocht, A. Delabie, Stefan De Gendt, Marc Heyns, Harald Okorn-Schmidt