Papers by Author: A. Peeva

Paper TitlePage

Ion Beam Induced Excess Vacancies in Si and SiGe and Related Cu Gettering
Authors: Reinhard Kögler, A. Peeva, An. Kuznetsov, J.S. Christensen, Bengt Gunnar Svensson, Wolfgang Skorupa
587
Defect Engineering and Prevention of Impurity Gettering at RP/2 in Ion-Implanted Silicon
Authors: Reinhard Kögler, A. Peeva, J. Kaschny, Wolfgang Skorupa, H. Hutter
399
Gettering Centres for Metals and Oxygen Formed in MeV-Ion-Implanted and Annealed Silicon
Authors: Reinhard Kögler, A. Peeva, W. Anwand, P. Werner, A.B. Danilin, Wolfgang Skorupa
235
Showing 1 to 3 of 3 Paper Titles