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Papers by Author: Antoon Theuwis

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Particle Deposition and Removal from Ge Wafers

Authors: Sonja Sioncke, Marcel Lux, Wim Fyen, Marc Meuris, Paul W. Mertens, Antoon Theuwis

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Recent Progress in Understanding of Lattice Defects in Czochralski-Grown Germanium: Catching-up with Silicon

Authors: Jan Vanhellemont, Steven Hens, J. Lauwaert, Olivier De Gryse, Piet Vanmeerbeek, Dirk Poelman, P. Śpiewak, Igor Romandic, Antoon Theuwis, Paul Clauws

Abstract: Recent progress is presented in the understanding of grown-in defects in Czochralskigrown germanium crystals with special emphasis on intrinsic point defects, on vacancy clustering and on interstitial oxygen. Whenever useful the results are compared with those obtained for silicon.

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A Study of the Influence of Typical Wet Chemical Treatments on the Germanium Wafer Surface

Authors: Bart Onsia, Thierry Conard, Stefan De Gendt, Marc Heyns, I. Hoflijk, Paul W. Mertens, Marc Meuris, G. Raskin, Sonja Sioncke, I. Teerlinck, Antoon Theuwis, Jan Van Steenbergen, Chris Vinckier

Grown-In Lattice Defects and Diffusion in Czochralski-Grown Germanium

Authors: Jan Vanhellemont, Olivier De Gryse, Steven Hens, Piet Vanmeerbeek, Dirk Poelman, Paul Clauws, Eddy Simoen, Cor Claeys, Igor Romandic, Antoon Theuwis, G. Raskin, H. Vercammen, P. Mijlemans

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