Papers by Author: C. Millet

Paper TitlePage

Copper Decontamination Ability of Supercritical-CO2/Additives on CVD and Spin-On Porous MSQ Materials
Authors: Jerome Daviot, V. Perrut, F. Gaillard, C. Millet, Adrien Danel, Lucile Broussous, Didier Louis
327
Removal of Heavy Organics by Supercritical CO2
Authors: Akshey Sehgal, M.R. Yalamanchili, C. Millet, Adrien Danel, F. Tardif
301
Compatibility of Supercritical Co2-Based Stripping with Porous Ultra Low-k Materials and Copper
Authors: C. Millet, Adrien Danel, M. Ndour, F. Tardif
113
Showing 1 to 3 of 3 Paper Titles