Papers by Author: Dae Jin Seong

Abstract: Since a clean environment and finite mass flow control on the molecular level are continuously required in current R&D fields and actual process lines, technologies on vacuum generation and control have been playing a significant role in merging a variety of technologies like Bio, Information, Environment, Energy, Space and Nano. Currently, the drive towards dry vacuum pumping has broadly occurred across a spectrum of vacuum applications, from semiconductor manufacture to industrial processing, due to its most visible advantages: it is contamination free. The integrated characteristics evaluation system for dry vacuum pumps has been established in KRISS in collaboration with several branch dry pump suppliers in Korea. The evaluation system exploits a constant volume flow meter to measure mass flow rates real-timely in standard level, and facilitates the evaluation of spatially averaged sound power levels using a semi-anechoic chamber. New and overhauled roots, claw, classical screw, and scroll type pumps supplied from the manufacturers have been evaluated using the evaluation system in terms of ultimate pressure, pumping speed, vibration, and sound power. We selected the mass flow measuring method with a constant chamber volume of 875 L because of its direct monitoring capability which does not allow blind mass flow rate measurements, and proved that the method allows us to measure five decades of mass flow rates from 1×10-2 to 1×103 mbar-l/s with a measurement uncertainty of ±3%, which is within the internationally accepted standards limit. In this work, we demonstrate how the integrated pump characteristics evaluation and mass flow control method have been significant in the low vacuum range of 10-4 to 103 mbar.

Abstract: We improved the sensitivity of existing commercial Pirani-vacuum gauges employing the AC method in the vacuum range above 1 Torr. The signals obtained through the use of the AC method yield information related to the specific heat and heat conductivity of gas. The output signal is obtained by two components: the oscillating temperature amplitude, and its phase. The amplitude increases with the decrease of pressure in the vacuum range from the atmosphere to about 1 Torr, which arises from the decrease of the heat capacity with the decrease of gas density. In contrast, the phase decreases monotonically as pressure decreases and the slop of a dΘ/d(log P) is large at higher than 1 Torr. This provides a good advantage for developing a new Pirani gauge with high sensitivity.

Abstract: Outgassing, the evolution of gas from the material in a vacuum, is not only a source of micro contamination in a semiconductor or the flat display panel production process, but it also a limitation factor in the ultra clean process of nano-technology. The outgassing from the materials of satellites and spacecrafts must be controlled for increased safety and function because space is also a vacuum environment. Several methods are used in outgassing measurement in general, but there is no one method suitable for obtaining all outgassing data. The most suitable method for a particular application must be chosen by the experimenter or user. Three types of outgassing measurement systems were fabricated and characterized, ‘Throughput method,’ ‘Rate of Rise method’ and ‘Mass Loss Measurement method’. The outgassing rates of many kinds of materials were measured and characterized using these systems.