Authors: Dong Woo Kim, Young Jae Shin, Kyoung Taik Park, Eung Sug Lee, Jong Hyun Lee, Myeong Woo Cho
Abstract: The objective of this research was to apply the artificial neural network algorithm to
predict the surface roughness in high speed milling operation. Tool length, feed rate, spindle speed,
cutting path interval and run-out were used as five input neurons; and artificial neural networks
model based on back-propagation algorithm was developed to predict the output neuron-surface
roughness. A series of experiments was performed, and the results were estimated. The
experimental results showed that the applied artificial neural network surface roughness prediction
gave good accuracy in predicting the surface roughness under a variety of combinations of cutting
conditions.
713
Authors: Tae Il Seo, Dong Woo Kim, Myeong Woo Cho, Eung Sug Lee
Abstract: Recently, the trends of industrial products move towards more miniaturization, variety
and mass production. Micro drilling which take high precision in cutting work is required to
perform more micro hole and high speed working. Especially, Micro deep hole drilling is becoming
more important in a wide spectrum of precision production industries, ranging from the production
of automotive fuel injection nozzle, watch and camera parts, medical needles, and thick multilayered
Printed Circuit Boards(PCB) that are demanded for very high density electric circuitry. The
industries of precision production require smaller holes, high aspect ratio and high speed working
for micro deep hole drilling. However the undesirable characteristics of micro drilling is the small
signal to noise ratios, wandering motion of drill, high aspect ratio and the increase of cutting force
as cutting depth increases. In order to optimize cutting conditions, an experimental study on the
characteristics of micro deep hole machining processes using a tool dynamometer was carried out.
And additionally, microscope with built-in an inspection monitor showed the relationship between
burr in workpieces and chip form of micro drill machining.
566
Authors: Hee Jung Lee, Seung Min Hyun, Hak Joo Lee, Dae Geun Choi, Dong Il Lee, Eung Sug Lee
Abstract: The reliable reproducibility of nano patterns or other nano structures is one of many issues
in the nano-imprint lithography process. An important prerequisite for reproducibility is suitable
adhesion properties of adhesion promoters or anti-sticking layer. In this study, rhombus shaped
symmetrical probe with a flat tip was developed and fabricated using MEMS fabrication technique.
For the experimental setup of the adhesion test using a UV curable PAK01 resin coated AFM tip with
several adhesion promoters, the flat tip is covered by PAK01 resist using micromanipulator.
Anti-sticking layers of silane agents were prepared on the tip by vapor deposition method. Adhesion
force between various adhesion promoters (GPTS, APMDS, APTS, DUV30J, O2 planairzation) and
PAK01 resist and the force between anti-sticking layer (FOTS, DDMS) and PAK01 resist were
evaluated using the force-distance mode of AFM. Adhesion force of GPTS and FOTS are about 7180
nN and 1660 nN, respectively.
1113
Authors: Jeong Dai Jo, Taik Min Lee, Chung Hwan Kim, Kwang Young Kim, Eung Sug Lee, Masayoshi Esashi
Abstract: The gate, source, and drain electrodes of organic thin-film transistor(OTFT) to use as a
switching device for a flexible display was fabricated in microcontact printing process with hard
poly(dimethylsiloxane)(h-PDMS) stamp. The OTFT with thin-film dielectric layer of
parylene-C(4300Å, 5000Å, 6500Å, 7500Å, and 9000Å) were formed using special coating system,
and organic semiconductor layer was ink-jet printing process at room temperature. The microcontact
printing process using self-assembled monolayer(SAM) and h-PDMS stamp made it possible to
fabricate OTFT with channel length down to 600nm, fabricated thin film electrode of Au/Cr
(100nm/5nm), and reduced the fabrication process by 20steps compared with photolithography
process. Since the fabrication process was done in room temperature, there was no appeared such as
pattern shrinkage, pattern transformation and bending problem.
661
Authors: Jeong Dai Jo, Taik Min Lee, Kwang Young Kim, Eung Sug Lee, Masayoshi Esashi
1257
Authors: Ki Don Kim, Young Suk Sim, Jun Ho Jeong, Hyun Kee Sohn, Eung Sug Lee, Sang Chan Lee, Ling Mei Fang
Abstract: We investigated the non-uniformity of the residual layer thickness caused by wafer deformation in
an experiment that examined different wafer thicknesses using UV-NIL with an element-wise patterned stamp
(EPS). Experiments using the EPS were performed on an EVG®620-NIL. Severe deformation of the wafer
served as an obstacle to the spread of resin drops, which caused non-uniformity of the residual layer thickness.
We also simulated the imprint process using a simplified model and finite element method to analyze the
non-uniformity.
649
Authors: Jeong Dai Jo, Kwang Young Kim, Eung Sug Lee, Masayoshi Esashi
Abstract: The flexible organic thin film transistor(OTFT) array to use as a switching device for an
organic light emitting diode(OLED) was designed and fabricated in the nanocontact printing and
low-temperature process. The gate, source, and drain electrode patterns of OTFT were fabricated by
nanocontact printing process. And dielectric layer of parylene and organic active semiconductor
layer of pentacene formed at room temperature or at a temperature lower than 40. The
nanocontact printing process using SAM and PDMS stamp made it possible to fabricate OTFT
arrays with channel lengths down to even submicron size, and reduced the fabrication process by 10
steps compared with photolithography. Since the process was done in room temperature, there was
no pattern shrinkage, transformation, and bending problem appeared. Also, it was possible to
improve electric field mobility, to decrease contact resistance, to increase close packing of
molecules by SAM, and to reduce threshold voltage by using a parylene.
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