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Papers by Author: F. Guyader

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'Resist / Wet Etch' Couple for Dual Gate Oxide

Authors: Alessio Beverina, I. Guilmeau, J.P. Carrere, N. Emonet, F. Guyader, V. Huard, Sébastien Petitdidier, R. Velard

235

Backside Cleaning for Copper Removal

Authors: Claire Therese Richard, F. Guyader, Kathy Barla

121

Dual Gate Oxide for 0.18μm Technologies and Below: Optimization of the Wet Processing Sequence

Authors: Didier Lévy, Sébastien Petitdidier, H. Bernard, F. Guyader, C. Dezauzier, C. Pizzetti

27

n-Type Polydrystalline Silicon for Luminescent Porous Silicon Films

Authors: F. Guyader, J.K. Jung, M. Guendouz, M. Sarret, P. Joubert

211