Papers by Author: Ferenc Riesz

Abstract: To assess deformation issues in SiC/Si, different pre-growth procedures were investigated, involving the addition of SiH4 to C3H8 during the temperature ramps used for the carbonization. 3C-SiC layers were deposited on (001) and (111) Si substrates by VPE. The mechanical deformation of the wafer was measured by makyoh, obtaining 2D maps of the entire wafers. For the same pre-growth procedures, the substrate curvature depends strongly on the orientation of the substrate, (001) or (111), being generally lower for (111) substrates. The deformation results were compared with XRD and Raman spectroscopy. Plastic deformation of the substrate was evidenced by XRD, while the presence of tensile stress is suggested by Raman analysis.

Abstract: A comparative study of the morphology of 3C-SiC films prepared with different C:Si ratios is presented. The silane precursor controls the growth rate at all values of C:Si ratio but combined of observations using Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) indicates that the C:Si ratio is critical in determining the grain size and at values of C:Si close to 1 texturing and faceting become evident. Makyoh Topography reveals various surface defects, a slight mesoscale roughness and bending of the epiwafers.

Abstract: The aim of this study was to find if nanocrystal layers obtained by well-established nanotechnology are able to induce deposition of hydroxyapatite [Ca10(PO4)6(OH)2]. It is known that nanosized objects and porous structures influence biological events and they may be used to create biologically integrated multifunctional devices including biomaterials and sensors. In this work, sequential physical vapour deposition of CdSe and SiO, or SiOx film was used to modify glass substrates. To study the ability of the nanostructured surfaces to induce hydroxyapatite deposition, samples were immersed in a simulated body fluid and simultaneously irradiated with a scanning laser beam for a few minutes. This resulted in a porous sponge-like non homogeneous hydroxyapatite layer, consisting of networks of aggregates of nano dimensions on the modified surfaces. Analysis showed higher Ca and P contents in the stripes of the laser-substrate interaction, which indicated the influence of the laser energy. The method of laser-liquid-solid interaction used has led to a synergistic effect due to the simultaneous use of the nanostructured substrate, aqueous solution and laser energy.