Papers by Author: Guo Jun Zhang

Abstract: A novel MEMS vector hydrophone with bionics structure was introduced in 2007. As the acoustic-electric transducer infrastructure has been optimized, the performance of the hydrophone has been greatly improved compared with the previous. This hydrophone calibration was finished in National Defense Underwater Acoustics Calibration Laboratory of China. According to test results, the sensitivity of the hydrophone is -165dB（including pre-amplification 20 dB）,The frequency response ranges from 20Hz to 2kHz (±5dB). And this hydrophone has a good directional pattern in form of "8"-shape.

Abstract: In this paper, we analysis the working principle of a cilium-type MEMS vector hydrophone, by analyzing we obtained the errors of the vector micro-sensor are deviations from column cilium. Since the structure is mainly picking up sound vibrations by the cilium, the piezoresistor which on the beams connected by Wheatstone bridge circuit will output the signals, so the deviation of cilium cylinder have greater impact the sensitivity in both directions of vector hydrophone. Through theoretical calculation and finite element simulation of the sensitive structure of the error analysis. By the structure of the hydrophone error test ,we obtained the sensitivity of X direction is 0.755mv / g, the sensitivity of Y direction is 0.683mv / g, The relative sensitivity error of two directions is 9.5% which is close to the simulation results. Finally, this paper give a solution to the error. (Abstract)

Abstract: A novel MEMS vector hydrophone with bionics structure was introduced in 2007. As the acoustic-electric transducer infrastructure and the acoustic package of hydrophone have been optimized, the performance of the hydrophone has been greatly improved compared with the previous. This hydrophone calibration was finished in National Defense Underwater Acoustics Calibration Laboratory of China. According to the test results, the sensitivity of the hydrophone is -165dB（including pre-amplification 20 dB）, the frequency response ranges from 20Hz to 2kHz (±5dB). And this hydrophone has a good directional pattern in the form of "8"-shape.

Abstract: Compared with the traditional vibration sensors, the micro-vibration sensor have many advantages, such as small size, high sensitivity and low noise which is based on micro-fabbrication.This paper introduced the micro-vibration sensors which sensitive structure are cilium and micro-elastic beams. The micro-vibration sensors were produced by the inductively coupled plasma technology (ICP), the maximal etching depth of which can be greater than 300μm, the thickness of beam is less than 20μm and the longth of cilium are more than 3000um.The sensitivity of the sensor is 102.5μV/g, the measurement range to +20g, and the resonant frequency is 2KHz.