Papers by Author: Hideo Kinoshita

Paper TitlePage

Improvement of SiC Wafer Warp by Annealing
Authors: Makato Sasaki, Shinsuke Harada, Yoshihiro Okamoto, Hideo Kinoshita, Youichi Miyanagi, Hiromu Shiomi
829
Synchronous Schlieren Image Analysis of Megasonic Single Wafer Cleaning
Authors: Takashi Azuma, Akihiro Tomozawa, Hideo Kinoshita, Shin-ichiro Umemura
55
Megasonic Silicon Wafer Cleaning and Its Influence on LSI Devices
Authors: Akihiro Tomozawa, Akihiro Ohnishi, Hideo Kinoshita, Takashi Nakano
235
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