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Articles by author: István Bársony

• Heavy Water in Gate Stack Processing
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p119)
• Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors
  Published in: Materials Science, Testing and Informatics I (p69)
• Silicon Surface Preparation and Passivation by Vapor Phase of Heavy Water
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p181)
• The Influence of Silicon Diffusion on the Transport Properties of the 2DEG in Si δ-Doped GaAs
  Published in: Defects in Semiconductors 17 (p663)
• Void-Free Epitaxial Growth of Cubic SiC Crystallites during CO Heat Treatment of Oxidized Silicon
  Published in: Silicon Carbide and Related Materials 2001 (p359)
• X-Ray Diffraction Characterisation of Polysilicon Layers
  Published in: European Powder Diffraction (p891)